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真空微电子器件的进展与问题

庄学曾 夏善红 刘光诒

庄学曾, 夏善红, 刘光诒. 真空微电子器件的进展与问题[J]. 电子与信息学报, 1997, 19(5): 688-694.
引用本文: 庄学曾, 夏善红, 刘光诒. 真空微电子器件的进展与问题[J]. 电子与信息学报, 1997, 19(5): 688-694.
Zhuang Xuezeng, Xia Shanhong, Liu Guangyi. A DISCUSSION ON SOME VACUUM MICROELECTRONIC DEVICES[J]. Journal of Electronics & Information Technology, 1997, 19(5): 688-694.
Citation: Zhuang Xuezeng, Xia Shanhong, Liu Guangyi. A DISCUSSION ON SOME VACUUM MICROELECTRONIC DEVICES[J]. Journal of Electronics & Information Technology, 1997, 19(5): 688-694.

真空微电子器件的进展与问题

A DISCUSSION ON SOME VACUUM MICROELECTRONIC DEVICES

  • 摘要: 本文简要地叙述了真空微电子学的主要进展,在介绍场发射阵列FEA、场发射显示器FED、真空微电子微波毫米波器件等的发展过程中,重点叙述了有关器件对FEA的特殊要求、可能的解决办法和存在的问题,并介绍了发展真空微电子微波管的主要内容和意义;最后提到了有效地发展我国真空微电子器件需重视的一个问题.
  • Buck D A, Shoulders K R. An approach to microminiature system. Proc. of the Eastern Joint Computer Conf., Amer. Inst. of Elect. Engrs. New York: 1958, 55-9.[2]Spindt C A. A thin film field emission cathode[J].J. Appl. Phys.1968, 39:3504-3505[3]Takao Utsumi. Vacuum microelectronics: whats new and exciting, Keynote address on 3rd Int1 Vacuum Electronics Conference. IEEE Trans. on ED, 1991, ED-38(10): 2276-2283.[4]Brodie I, Schwoelbel P R. Vacuum microelectronic devices[J].Proc. IEEE.1994, 82(7):1006-1034[5]Fowler R H, Nordheim L W. Electron emission in intense fields, Proc. R. Soc., London 1928, A119: 173.[6]Spindt C A, Holland C E, Rosengreen A, Brodie I. Field emitter arrays for vacuum microelectronics. IEEE Trans. on ED, 1991, ED-38(10): 2355.[7]Thomas R N, Wickstrom R A, Schroder D K, Nathanson H C. Fabrication and some application of large area silicon field emission arrays.[J]. Solid-State Electronics.1974,17:155-[8]Brodie I, Spindt C A. Vacuum microelectronics. Adv. Electron. Electron Physics, 1992, 82: 1-78.[9]Busta H H. Review vacuum microelctronics-1992, Journal of Micromech. Microeng,1992, (2): 43-74.[10]Rakhshandehroo M R, Pang S W. Fabrication of Si field emitters by dry etching and mask erosion. Journal of Vac. Sci. and Technol., 1996, B 14(2): 612-616.[11]Cumin C. The field emission display: A new flat panel technology, Invited Paper, Int1 Display Research Conference, San Diego, CA: 1990, 12-5.[12]Lee K J, Hill D N, Cockran J K, Chapman A T. Current limiting of field emission array cathodes, 1st Int1 Conf. on Vacuum Microelectronics, Williamsburg, Virginia, USA: 1988.[13]Vaudine P, Meyer R. `Microtips fluorescent display, Proc. IEDM 1991, 197-200.[14]Yasushi Toma, Seigo Kanemaro, Junji Itoh. Electron-beam characteristics of double-gated Si field[15]emission arrays. Journal of Vacuum Sci. and Technol., 1996, B 14(3): 1902-1905.[16]Spallas J P, Hawryluk A M, Kania D R, Field emitter array mask patterning using laser interference lithography. J. of Vacuum Sci. and Technol., 1995, B 13(5): 1973-1978.[17]Djubua B C, Chubun N N, Emission properties of Spindt-type cold cathodes with different emission[18]cone material. IEEE Trans. on ED, 1991, ED-38(10): 2314-2316.[19]Macaulay J M, Brodie I, Spindt C A, Hollan C E. Cesiated thin-film field-emission microcathode arrays. Appl. Phys. Lett. 1992, 61(8): 997-999.[20]Tianbao Xue, Mackie W A, Dvis P R. Field emission from ZrC film on Si and Mo single emitters and emitter arrays, Journal of Vacuum Sci. and Technol., 1996, B 14(3): 2090-2092.[21]Fursey G. The forming of submicrogeometry on the solid and liquid surface in the strong electric fields, 3rd Int1 Conf. on Vacuum Microelectronics, Monterey CA, USA: 1990.[22]Hunt C E, Trujillo J T, Orvis W J. Structure and electrical characteristics of Si field-emission micro-electronic devices, IEEE Trans. on ED. 1991, ED-38(10): 2309-2313.[23]McGruer N E, Johnson A C, McKnight S W, Schwab W C, Chung Chan, Shen Tong. Prospects for a 1-TH2 vacuum microelectronics microstrip amplifier. IEEE Trans. on ED. 1991, ED-38(3): 666-671.[24]Philips P M, Neidert R E, Malsawma L, Hor C. Microwave triode amplifiers from 1-2 GHz using molybdenum thin film field emission cathode devices. IEEE Trans. on ED. 1995, ED-42: 1674-1680.[25]Friz W, Ettenburg M. The SIMTRON concept, 3rd Int1 Conf. on Vacuum Microelectronics, Monterey CA, USA: 1990.[26]Liu G Y, Jin S L, Bian P, Liu J H, Zhou Q H, Xue Z. Cha Z Y. A new kind of chip structure for[27]TFFEC-Wide channel isolation on the dielectric surface. 1st Int1 Conf. on Vacuum Microelectronics, Technical Program, Williamsburg, USA: 1988,7-8.[28]柯春和,李兴辉.平板显示器进展.中国电子学会真空电子学分会第10届年会论文集(下集),北京:1995, 20-23.
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出版历程
  • 收稿日期:  1996-05-20
  • 修回日期:  1996-12-30
  • 刊出日期:  1997-09-19

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