微波管栅发射问题的研究
Study on grid emission of microwave power tubes
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摘要: 利用离子束辅助沉积技术在 Mo栅极上镀上并注入一层 Hf膜,对镀后的样品进行了形貌、结构、成份、膜厚及 Mo、Hf界面分析。将样品进行电子管模拟栅发射试验,栅极温度为 650℃,试验 1000h以上基本无栅发射电流,可以提高栅控管的可靠性和寿命。实验结果表明,阴极中的活性物质Ba蒸发到镀Hf的 Mo栅极表面,Ba,Hf和O2能形成化合物,从而有效抑制栅极发射电流。
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关键词:
- 栅发射; 离子束辅助沉积; 化合物
Abstract: Hf film is coated on the surface of Mo-grids by vacuum ion beam aided deposition technology. The SEM, XRD and RBS analyses are performed on modified Mo-grids. Life-span tests of this modified Mo-grid are carried out by diode experiment. When the temperature of the modified Mo-grids is kept at 650 ℃, the modified Mo-grids electron emission can not be detected with microammeter after 1000h life-span. The experimental results show that after the grid is contaminated by electron emission substance Ba of the cathode Hf formed compounds restrain effectively electron emission of grid. -
刘学悫,阴极电子学,北京,科学出版社,1980,第一章.[2]国外行波管长寿命氧化物阴极概述,四机部电真空专业技术组,第三部分,1975,20.[3]S. Narita, Research on the Work Function of Thermionic Cathode, J. Phys. Soc. Japan., 1954,Part9, 23. ［4］Metals Handbook, Eighth Edition, Metals Park, Ohio, USA, 537.[4]官冲,张济忠,廖显恒,抗电子发射钼栅极的性能分析,功能材料,1999,30(3),268-270. -
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