IC制造中真实缺陷轮廓模型的比较
COMPARISON OF MODELS OF REAL DEFECT OUTLINES IN THE IC MANUFACTURING PROCESS
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摘要: 本文对现有的IC制造中真实缺陷轮廓的建模方法进行了比较,得到了一些有意义的结果。该结果为进行有效的集成电路(IC)成品率预报及故障分析提供了有益的借鉴。Abstract: The approaches to model the real defect outlines in the IC manufacturing process are compared and some useful conclusions are obtained. The results obtained in this paper will be helpful for yield prediction and fault analysis of IC.
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Ferguson F J, Shen J P. Extraction and simulation of realistic CMOS faults using inductive fault analysis. Presented at the Internat. Test Conf., Washington, DC: September 1988, 475-484.[2]Ferris Prabhu A V. Modeling the critical area in yield forecasts. IEEE J. of Solid-State Circuit, SC-20(4): 874-878.[3]Maly W. Computer-aided design for VLSI circuit manufacturability[J].Proc. IEEE.1990, 78(2):356-[4]392.[5]de Gyvez J P, Chennian D. IC defect sensitivity for footprint type spot defects[J].IEEE Trans. on Computer-Aided Design.1992, 11(5):638-658[6]Cristopher Hess, Albrecht Strole. Modeling of real defect outlines for defect size distribution and yield prediction. Proc. IEEE Int. Conference on Microelectronic Test Structures, Sitges, Barcelona, Spain: March 1993, Vol 6, 75-80.[7]姜晓鸿,郝跃,等.IC制造中的真实缺陷轮廓表征方法研究.电子学报(已录用,待发表). -
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