一种高品质因子模态局域化MEMS电场传感器

王贵杰; 储昭志; 杨鹏飞; 冉莉芳; 彭春荣; 李建华; 张波; 闻小龙

doi:10.11999/JEIT241008

一种高品质因子模态局域化MEMS电场传感器

doi: 10.11999/JEIT241008

王贵杰^{1, 2},
储昭志³,
杨鹏飞⁴,
冉莉芳^{1, 2},
彭春荣⁵,
李建华^{1, 2},
张波^{1, 2},
闻小龙^{1, 2, ,}

1.
北京科技大学数理学院北京 100083
2.
北京科技大学北京市弱磁检测及应用工程技术研究中心北京 100083
3.
中国科学院微电子研究所北京 100029
4.
北京信息科技大学理学院北京 100192
5.
中国科学院空天信息创新研究院北京 100190

基金项目: 国防基础科研计划(JCKY2022110C013)，国家自然科学基金(62031025, 62101054)，国家重点研发计划(2022YFB3207300)，北京科技大学来华留学课程建设项目2023KCYB003)

详细信息

作者简介:
王贵杰：男，博士生，研究方向为MEMS谐振式电场传感器，非线性和参数化激励原理研究

储昭志：男，副研究员，研究方向为MEMS与微加工、微型电场传感器及其应用

杨鹏飞：男，副教授，研究方向为微传感器与微系统、新型电学量传感器、低频电场探测

冉莉芳：女，硕士生，研究方向为微型电场传感器及其非线性研究

彭春荣：男，研究员，研究方向为微传感器与微系统、新型电学量传感器及应用

李建华：男，教授，研究方向为微加工技术、MEMS惯性传感器、MEMS光学器件

张波：男，高级工程师，研究方向为磁电材料、器件和传感系统

闻小龙：男，副教授，研究方向为微型传感器及系统、电场传感器、磁场传感器

通讯作者:
闻小龙　xiaolongwen@ustb.edu.cn

中图分类号: TN4; TP212
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- 文章访问数: 45
- HTML全文浏览量: 23
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- 被引次数: 0
出版历程
- 收稿日期: 2024-11-12
- 修回日期: 2025-03-12
- 网络出版日期: 2025-03-19

A High-quality Factor Mode-localized MEMS Electric Field Sensor

WANG Guijie^{1, 2},
CHU Zhaozhi³,
YANG Pengfei⁴,
RAN Lifang^{1, 2},
PENG Chunrong⁵,
LI Jianhua^{1, 2},
ZHANG Bo^{1, 2},
WEN Xiaolong^{1, 2
, ,}

1.
School of Mathematics and Physics, University of Science and Technology Beijing, Beijing 100083, China
2.
Beijing Weak Magnetic Detection and Application Engineeering Technology Reserch Center, University of Science and Technology Beijing, Beijing 100083, China
3.
Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
4.
School of Applied Science, Beijing Information Science and Technology University, Beijing 100192, China
5.
Aerospace Information Research Institute, Chinese Academy of Science, Beijing 100094, China

Funds: The National Defense Basic Scientific Research program of China (JCKY2022110C013), The National Natural Science Foundation of China (62031025, 62101054), The National Key Research and Development Program of China (2022YFB3207300), The Curriculum Construction Project for International Students of USTB (2023KCYB003)

摘要

摘要: 高性能微机电系统电场传感器是大气电场及非接触电压测量的核心部件，模态局域化效应可显著提升传感器的分辨力等性能，是电场传感器的重要发展方向。然而，基于弱耦合的谐振系统在品质因子较低时会出现模态混叠现象，难以读取有效振幅信息。该文提出一种高品质因子的新型模态局域化MEMS电场传感结构，采用双端音叉设计和T形系绳固定锚点的结构以减少能量损耗，实现了高品质因子和高分辨力，有效避免了模态混叠现象。对该结构进行了理论分析和数值模拟，制备了传感器原理样机，在 ${10}^{-3}\;\mathrm{P}\mathrm{a}$ 气压下对传感器进行了性能测试。测试结果表明，在0～90 kV/m电场强度范围内，电场传感器分辨力达 $32\mathrm{ }(\mathrm{V}/\mathrm{m})/\sqrt {\mathrm{H}\mathrm{z}}$ ，品质因子达42 423。
- 模态局域化 /
- 微机电系统 /
- 电场传感器 /
- 高品质因子 /
- T形系绳 /
- 双端音叉
Abstract: Objective High-performance Micro-Electro-Mechanical Systems (MEMS) Electric Field Sensors (EFS) are essential for measuring atmospheric electric fields and non-contact voltage. The mode localization effect can significantly improve resolution and is a recent focus in EFS research. However, in weakly coupled resonant systems, mode aliasing occurs when the quality factor is low, hindering the extraction of valid amplitude information. This study proposes a novel resonant MEMS EFS based on mode localization. The sensor employs a Double-Ended Tuning Fork (DETF) structure and a T-shaped tether to minimize energy loss, achieving a high-quality factor and resolution while effectively mitigating mode aliasing. This study presents theoretical analysis and numerical simulations. A prototype is fabricated and tested at a pressure of ${10}^{-3}\;\mathrm{P}\mathrm{a}$ . Experimental results demonstrate that within an electric field range of $0～90\;\mathrm{k}\mathrm{V}/\mathrm{m}$ , the EFS exhibits a resolution of $32(\mathrm{V}/\mathrm{m})/\sqrt {\mathrm{H}\mathrm{z}}$ , and a quality factor of 42,423. Methods The sensor comprises two coupled resonators based on a tuning fork and T-shaped tether structure. It utilizes the principle of mode localization and an amplitude ratio output metric to enhance electric field sensing performance and prevent mode aliasing. The primary measurement principle is based on the transmission of induced charge from the electric field sensing electrode to the perturbed electrode of Resonator 1 through an electrical connection. This perturbed electrode generates a negative electrostatic perturbation, inducing mode localization in the coupled resonators. The resulting change in the amplitude ratio enables electric field detection. Furthermore, the tuning fork and T-shaped tether structure are designed to minimize clamping and anchor losses, thereby achieving a high-quality factor and effectively mitigating mode aliasing. Results and Discussions This study presents a mode-localized MEMS EFS that achieves a high-quality factor of 42,423 and a high resolution of $32\;(\mathrm{V}/\mathrm{m})/\sqrt {\mathrm{H}\mathrm{z}}$ , effectively preventing mode aliasing. Experiments are conducted in a vacuum chamber at a pressure of ${10}^{-3}\;\mathrm{P}\mathrm{a}$ . The vacuum environment leads to heat accumulation from the amplifiers on the circuit board, increasing the board’s temperature and causing temperature drift in the sensor. Temperature drift is identified as the primary source of error in sensor testing. Future work will focus on testing the sensor chip with vacuum packaging to mitigate temperature drift caused by the vacuum chamber. Further optimization of the chip and circuit structures is conducted to minimize the effects of feedthrough and parasitic capacitance. Additionally, a differential structure will be designed to enhance common-mode rejection. Conclusions This study addresses mode aliasing in weakly coupled structures by proposing a mode-localized EFS based on a DETF and a T-shaped tether design. The DETF reduces clamping losses, while the T-shaped tether minimizes anchor losses. These structural optimizations reduce energy dissipation, enhance the quality factor, and effectively mitigate mode aliasing. The structural design, working principle, and sensitivity characteristics of the sensor are analyzed through numerical simulations, demonstrating that a lower quality factor under the same coupling strength can induce mode aliasing. The sensor fabrication process is introduced, and a prototype is developed. A testing system is established to evaluate the sensor’s performance in both open-loop and closed-loop configurations. Experimental results indicate that under a pressure of ${10}^{-3}\;\mathrm{P}\mathrm{a}$ and within an electric field range of $0～90\;\mathrm{k}\mathrm{V}/\mathrm{m}$ , the sensor achieves a quality factor of 42,423, a resolution of $32\;(\mathrm{V}/\mathrm{m})/\sqrt {\mathrm{H}\mathrm{z}}$ , and a sensitivity of $0.0336\;/(\mathrm{k}\mathrm{V}/\mathrm{m})$ . The sensor demonstrates a high-quality factor and excellent electric field resolution while effectively mitigating mode aliasing in mode-localized sensors. This work provides valuable insights for EFS research and the structural design of mode-localized sensors.
- Mode localization /
- Micro-Electro-Mechanical Systems (MEMS) /
- Electric Field Sensor (EFS) /
- High-quality factor /
- T-shaped tether /
- Double-Ended Tuning Fork (DETF)

HTML全文

图 1 模态局域化电场传感器工作原理图

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图 2 模态局域化电场传感器的质量-弹簧-阻尼器模型及仿真结果

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图 3 基于数值仿真对比不同品质因子情况下谐振器的幅频响应，品质因子降低会导致模态混叠现象

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图 4 模态局域化电场传感器的工艺流程

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图 5 前放电路照片及放大前路原理图

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图 6 测试系统照片

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图 7 模态局域化电场传感器的两阶模态振型及其测试的幅频和相频曲线

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图 8 谐振器的振幅比和频移的相对偏移量灵敏度对比

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图 9 基于开环测试和闭环测试的幅值比灵敏度对比

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图 10 在10^–3 Pa气压下两个谐振器的噪声谱密度

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表 1 基于场磨机制和模态局域化原理的电场传感器性能对比

传感器类型	分辨力( $(\mathrm{V}/\mathrm{m})/\sqrt {\mathrm{H}\mathrm{z}}$ )	品质因子
场磨式^[22]	50	31 034
场磨式^[20]	–	30 727
模态局域化^[11]	22.9	25 000
模态局域化^[10]	10	–
本文	32	42 423

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