高级搜索

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

基于锆钛酸铅的低电压驱动MEMS电场传感器研究

雷虎成 夏善红 彭春荣 毋正伟 张洲威 刘俊 彭思敏 刘向明 高雅浩

雷虎成, 夏善红, 彭春荣, 毋正伟, 张洲威, 刘俊, 彭思敏, 刘向明, 高雅浩. 基于锆钛酸铅的低电压驱动MEMS电场传感器研究[J]. 电子与信息学报, 2023, 45(1): 150-157. doi: 10.11999/JEIT211144
引用本文: 雷虎成, 夏善红, 彭春荣, 毋正伟, 张洲威, 刘俊, 彭思敏, 刘向明, 高雅浩. 基于锆钛酸铅的低电压驱动MEMS电场传感器研究[J]. 电子与信息学报, 2023, 45(1): 150-157. doi: 10.11999/JEIT211144
LEI Hucheng, XIA Shanhong, PENG Chunrong, WU Zhengwei, ZHANG Zhouwei, LIU Jun, PENG Simin, LIU Xiangming, GAO Yahao. Research on MEMS Electric Field Sensor with Low Driving Voltage Based on Lead Zirconate Titanate[J]. Journal of Electronics & Information Technology, 2023, 45(1): 150-157. doi: 10.11999/JEIT211144
Citation: LEI Hucheng, XIA Shanhong, PENG Chunrong, WU Zhengwei, ZHANG Zhouwei, LIU Jun, PENG Simin, LIU Xiangming, GAO Yahao. Research on MEMS Electric Field Sensor with Low Driving Voltage Based on Lead Zirconate Titanate[J]. Journal of Electronics & Information Technology, 2023, 45(1): 150-157. doi: 10.11999/JEIT211144

基于锆钛酸铅的低电压驱动MEMS电场传感器研究

doi: 10.11999/JEIT211144
基金项目: 国家自然科学基金(62031025, 61971398, 41775024),中国科学院科研仪器设备研制项目(YJKYYQ20200026, GJJSTD20210004)
详细信息
    作者简介:

    雷虎成:男,博士生,研究方向为高灵敏度MEMS电场传感器

    夏善红:女,博士,研究员,研究方向为传感器与微系统技术

    彭春荣:男,博士,研究员,研究方向为MEMS电场传感器芯片及系统

    毋正伟:男,博士,副研究员,MEMS谐振式微传感器研制及其真空封装技术

    张洲威:男,博士生,研究方向为静电探测及成像

    刘俊:男,博士生,研究方向为MEMS电场传感器的真空封装技术

    彭思敏:女,博士生,研究方向为单芯片MEMS三维电场传感器

    刘向明:男,博士生,研究方向为高灵敏度的MEMS电场传感器

    高雅浩:男,博士生,研究方向为高灵敏度的MEMS电场传感器

    通讯作者:

    夏善红 shxia@mail.ie.ac.cn

  • 中图分类号: TN3; TP212

Research on MEMS Electric Field Sensor with Low Driving Voltage Based on Lead Zirconate Titanate

Funds: The National Natural Science Foundation of China (62031025, 61971398, 41775024), The Scientific Instrument Developing Project of the Chinese Academy of Sciences (YJKYYQ20200026, GJJSTD20210004)
  • 摘要: 该文提出一种基于锆钛酸铅(PZT)的低电压驱动微机电系统(MEMS)电场传感器。该传感器基于电荷感应原理,其敏感单元由固定电极和可动电极构成。固定电极与可动电极均为感应电极,同时两者又是屏蔽电极。在PZT压电材料的驱动下,可动电极产生垂直于敏感芯片基底的振动并且与固定电极形成交互屏蔽,当存在待测电场时,分别在可动电极和固定电极上产生相位差为180°的感应电流信号。该文进行了传感器的设计和有限元仿真,提出敏感微结构的加工工艺流程,突破了基于PZT压电材料的可动电极MEMS工艺兼容制备技术,完成了敏感芯片制备,对传感器进行了性能测试。该传感器具有工作电压低的突出优点。实验测试表明,在0~50 kV/m电场强度范围内,采用1 V交流驱动电压,电场传感器的灵敏度为0.292 mV/(kV/m),线性度为2.89%。
  • 图  1  传感器结构与原理示意图

    图  2  传感器的等效电路模型

    图  3  互屏蔽电极在可动电极静止状态下的电场分布图

    图  4  互屏蔽电极在可动电极运动状态下的电场分布图

    图  5  可动结构位移的仿真模型和仿真结果

    图  6  PZT溶胶的制备流程

    图  7  敏感芯片的加工工艺流程

    图  8  压电薄膜的XRD图

    图  9  电场敏感芯片的SEM照片

    图  10  电场传感器测试标定装置

    图  11  电场传感器的响应曲线

    表  1  仿真结构参数

    结构参数参数值结构参数参数值(μm)
    梁1的长度1900 μm可动电极的长度600
    梁1的宽度100 μm可动电极的宽度5
    梁1的厚度4 μm可动电极之间的间隙15
    梁2的长度650 μm可动电极的厚度4
    梁2的宽度60 μmPZT薄膜的长度650
    梁2的厚度4 μmPZT薄膜的宽度53
    可动电极的数量84×2PZT薄膜的厚度0.6
    下载: 导出CSV
  • [1] 任仁, 陈贤祥, 夏善红, 等. 空间电磁环境监测用双探针式星载电场探测仪[J]. 电子与信息学报, 2012, 34(10): 2489–2493. doi: 10.3724/SP.J.1146.2012.00299

    REN Ren, CHEN Xianxiang, XIA Shanhong, et al. Spaceborne double-probe electric field sensor for space electromagnetic environment monitoring[J]. Journal of Electronics &Information Technology, 2012, 34(10): 2489–2493. doi: 10.3724/SP.J.1146.2012.00299
    [2] ZENG Qingfeng, WANG Zhenhui, GUO Fengxia, et al. The application of lightning forecasting based on surface electrostatic field observations and radar data[J]. Journal of Electrostatics, 2013, 71(1): 6–13. doi: 10.1016/j.elstat.2012.10.007
    [3] CUI Yong, SONG Xiao, WANG Chen, et al. Ground-level DC electric field sensor for overhead HVDC/HVAC transmission lines in hybrid corridors[J]. IET Generation, Transmission & Distribution, 2020, 14(19): 4173–4178. doi: 10.1049/iet-gtd.2019.1413
    [4] 张成铭, 徐晓英, 舒晓榕, 等. 静电放电对PCB轨线耦合的实验及仿真研究[J]. 电子测量与仪器学报, 2020, 34(5): 103–111. doi: 10.13382/j.jemi.B1902854

    ZHANG Chengming, XU Xiaoying, SHU Xiaorong, et al. Experimental and simulation study on the coupling with the PCB trace by electrostatic discharge[J]. Journal of Electronic Measurement and Instrumentation, 2020, 34(5): 103–111. doi: 10.13382/j.jemi.B1902854
    [5] 王颖. 电场传感器研究综述[J]. 传感器技术与应用, 2021, 9(1): 24–33. doi: 10.12677/JSTA.2021.91004

    WANG Ying. Review of electric field sensors[J]. Journal of Sensor Technology and Application, 2021, 9(1): 24–33. doi: 10.12677/JSTA.2021.91004
    [6] RONCIN A, SHAFAI C, and SWATEK D R. Electric field sensor using electrostatic force deflection of a micro-spring supported membrane[J]. Sensors and Actuators A:Physical, 2005, 123/124: 179–184. doi: 10.1016/j.sna.2005.02.018
    [7] 杨鹏飞, 彭春荣, 张海岩, 等. SOI微型电场传感器的设计与测试[J]. 电子与信息学报, 2011, 33(11): 2771–2774. doi: 10.3724/SP.J.1146.2010.01285

    YANG Pengfei, PENG Chunrong, ZHANG Haiyan, et al. Design and testing of a SOI electric-field microsensor[J]. Journal of Electronics &Information Technology, 2011, 33(11): 2771–2774. doi: 10.3724/SP.J.1146.2010.01285
    [8] BAHREYNI B, WIJEWEERA G, SHAFAI C, et al. Analysis and design of a micromachined electric-field sensor[J]. Journal of Microelectromechanical Systems, 2008, 17(1): 31–36. doi: 10.1109/JMEMS.2007.911870
    [9] KOBAYASHI T, OYAMA S, OKADA H, et al. An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever[C]. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, 2012: 527–530.
    [10] YANG Pengfei, PENG Chunrong, FANG Dongming, et al. Design, fabrication and application of an SOI-based resonant electric field microsensor with coplanar comb-shaped electrodes[J]. Journal of Micromechanics and Microengineering, 2013, 23(5): 055002. doi: 10.1088/0960-1317/23/5/055002
    [11] CHEN Tao, SHAFAI C, RAJAPAKSE A, et al. Micromachined ac/dc electric field sensor with modulated sensitivity[J]. Sensors and Actuators A:Physical, 2016, 245: 76–84. doi: 10.1016/j.sna.2016.04.054
    [12] 杨鹏飞, 陈博, 闻小龙, 等. 一种基于MEMS芯片的新型地面大气电场传感器[J]. 电子与信息学报, 2016, 38(6): 1536–1540. doi: 10.11999/JEIT150994

    YANG Pengfei, CHEN Bo, WEN Xiaolong, et al. A novel MEMS chip-based ground atmospheric electric field sensor[J]. Journal of Electronics &Information Technology, 2016, 38(6): 1536–1540. doi: 10.11999/JEIT150994
    [13] CHU Zhaozhi, PENG Chunrong, REN Ren, et al. A high sensitivity electric field microsensor based on torsional resonance[J]. Sensors, 2018, 18(1): 286. doi: 10.3390/s18010286
    [14] 储昭志, 彭春荣, 任仁, 等. 一种扭转谐振式MEMS电场传感器[J]. 传感器与微系统, 2019, 38(6): 83–85,88. doi: 10.13873/J.1000-9787(2019)06-0083-03

    CHU Zhaozhi, PENG Chunrong, REN Ren, et al. A MEMS-based electric field sensor with torsional resonance[J]. Transducer and Microsystem Technologies, 2019, 38(6): 83–85,88. doi: 10.13873/J.1000-9787(2019)06-0083-03
    [15] 雷虎成, 夏善红, 彭春荣, 等. 一种压电驱动互屏蔽电极MEMS电场传感器[J]. 微纳电子与智能制造, 2020, 2(4): 52–58. doi: 10.19816/j.cnki.10-1594/tn.2020.04.052

    LEI Hucheng, XIA Shanhong, PENG Chunrong, et al. Piezoelectric driven MEMS electric field sensor with mutual shielding electrodes[J]. Micro/nano Electronics and Intelligent Manufacturing, 2020, 2(4): 52–58. doi: 10.19816/j.cnki.10-1594/tn.2020.04.052
    [16] 闻小龙, 杨鹏飞, 储昭志, 等. 基于MEMS的距离自适应型非接触静电仪[J]. 电子与信息学报, 2021, 43(10): 3068–3074. doi: 10.11999/JEIT200571

    WEN Xiaolong, YANG Pengfei, CHU Zhaozhi, et al. A daptive-distance noncontact electrostatic meter based on MEMS technology[J]. Journal of Electronics &Information Technology, 2021, 43(10): 3068–3074. doi: 10.11999/JEIT200571
    [17] 朱莎, 曾晗, 王师奇, 等. 一种新型微加工交直流电场传感器设计[J]. 仪表技术与传感器, 2021(6): 41–45. doi: 10.3969/j.issn.1002-1841.2021.06.008

    ZHU Sha, ZENG Han, WANG Shiqi, et al. Design of novel micromachined AC/DC electric field sensor[J]. Instrument Technique and Sensor, 2021(6): 41–45. doi: 10.3969/j.issn.1002-1841.2021.06.008
    [18] WEN Xiaolong, YANG Pengfei, ZHANG Zhouwei, et al. Resolution-enhancing structure for the electric field microsensor chip[J]. Micromachines, 2021, 12(8): 936. doi: 10.3390/mi12080936
    [19] WEN Xiaolong, YANG Pengfei, CHU Zhaozhi, et al. Toward atmospheric electricity research: A low-cost, highly sensitive and robust balloon-borne electric field sounding sensor[J]. IEEE Sensors Journal, 2021, 21(12): 13405–13416. doi: 10.1109/JSEN.2021.3070130
  • 加载中
图(11) / 表(1)
计量
  • 文章访问数:  280
  • HTML全文浏览量:  135
  • PDF下载量:  54
  • 被引次数: 0
出版历程
  • 收稿日期:  2021-10-20
  • 录用日期:  2022-02-21
  • 修回日期:  2022-02-17
  • 网络出版日期:  2022-03-05
  • 刊出日期:  2023-01-17

目录

    /

    返回文章
    返回