微型电场传感器在工频电场测量中的应用研究

仝杰; 雷煜卿; 刘国华; 王鹤; 金学明; 杨鹏飞; 彭春荣

doi:10.11999/JEIT180217

微型电场传感器在工频电场测量中的应用研究

doi: 10.11999/JEIT180217

仝杰¹,
雷煜卿¹,
刘国华^{2, 3},
王鹤^{2, 3},
金学明^{2, 3},
杨鹏飞^4, ,,
彭春荣⁴

1.
中国电力科学研究院有限公司北京 100192
2.
北京智芯微电子科技有限公司电力芯片设计分析实验室北京 100192
3.
北京智芯微电子科技有限公司北京市电力高可靠性集成电路设计工程技术研究中心北京 100192
4.
北京中科飞龙传感技术有限责任公司北京 100083

基金项目: 国家发展改革委物联网技术研发及产业化专项(发改办高技〔2012〕2766号)；国家电网公司总部科技项目(SGJSDK00ZPJS1600203)

详细信息

作者简介:
仝杰：男，1983年生，高级工程师，研究方向为电力智能设备与传感技术

雷煜卿：男，1975年生，高级工程师，研究方向为电力系统通信及传感技术

杨鹏飞：男，1986年生，博士后，研究方向为MEMS传感器设计与加工、低频电磁场探测、大气电场探测、工频电场检测等

通讯作者:
杨鹏飞　 yang330650591@126.com

中图分类号: TP212.1
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- 被引次数: 0
出版历程
- 收稿日期: 2018-03-07
- 修回日期: 2018-08-14
- 网络出版日期: 2018-08-23
- 刊出日期: 2018-12-01

Power-frequency Electric Field Measurement Using a Micromachined Electric Field Sensor

Jie TONG¹,
Yuqing LEI¹,
Guohua LIU^{2, 3},
He WANG^{2, 3},
Xueming JIN^{2, 3},
Pengfei YANG^{4
, ,},
Chunrong PENG⁴

1.
China Electric Power Research Institute, Co., Ltd., Beijing 100192, China
2.
State Grid Key Laboratory of Power Industrial Chip Design and Analysis Technology, Beijing Smart-Chip Mircroelectronics Technology Co., Ltd., Beijing 100192, China
3.
Beijing Engineering Research Center of High-reliability IC with Power Industrial Grade, Beijing Smart-Chip Microelectronics Tchnology Co., Ltd., Beijing 100192, China
4.
Beijing TFlying Transducer Technology Co., Ltd., Beijing 100083, China

Funds: The Special Fund of National Development and Reform Commission for IoT R&D and Industrialization (NDRC High-Tec (2012) 2766), The Headquarter Science and Technology Fund of State Grid Corporation of China (SGJSDK00ZPJS1600203)

摘要

摘要: 该文基于高性能的MEMS电场敏感芯片研制出一种新型的工频电场测量系统。针对芯片调制被测电场后其输出信号的特征，采用正交相关检测原理提出一种可抑制背景干扰噪声的工频电场解调算法，设计出小型化、空间分辨力高的工频电场测量探头，并在基础上提出MEMS工频电场测量系统的系统级设计方案，成功实现了MEMS电场敏感芯片输出信号的无线采集、滤波、以及电场信号的高精度解调。高压输电线路下工频电场测量结果表明，MEMS工频电场测量系统与传统电场测量仪的测量结果具有良好的一致性。
- 电场传感器 /
- 工频电场 /
- 正交相关检测
Abstract: A novel power frequency electric field measurement system based on high-performance MEMS electric field sensing chips is developed. Based on cross-correlation detection principle, a power frequency electric field demodulation algorithm of MEMS sensing chips that can inhibit background interference noise is proposed. And a small-scale, high-resolution electric field measuring probe is designed. Moreover, the system overall structure scheme is designed for implementation of high-accuracy demodulation electric field signals. The test result under power lines shows that the plotted curves of the developed MEMS system are consistent with Narda EFA-300.
- Electric field sensor /
- Power-frequency electric field /
- Cross-correlation detection

HTML全文

图 1 MEMS电场传感器敏感芯片感应原理

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图 2 MEMS电场敏感芯片前置放大电路

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图 3 MEMS工频电场测量探头

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图 4 MEMS工频电场测量系统整体框图

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图 6 MEMS工频电场测量系统样机

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图 5 信号解调软件流程图

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图 7 MEMS工频电场测量系统零点温度特性曲线

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图 9 10 kV输电线路线下电场测试与计算曲线

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图 8 10 kV输电线路测试现场照片

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图 11 同塔多回输电线路电场测试曲线

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图 10 同塔多回输电线路照片

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表 1 MEMS工频电场测量系统零点温度特性测试数据

温度(℃)	–40	–30	–20	–10	0	10	20	30	40	50
零点(V/m)	–1.39	–1.22	–1.13	–0.74	–1.22	–0.39	–0.04	–0.22	0.52	0.13

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表 2 10 kV输电线路线下电场测试与计算数据

距离(m)	0	2	4	6	8	10
MEMS (V/m)	40.08	56.90	59.66	43.32	30.68	19.89
EFA-300 (V/m)	39.65	52.02	56.33	46.68	33.39	22.68
计算值(V/m)	44.0	51.6	53.4	44.8	33.6	24.3

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表 3 同塔多回输电线路电场测试数据

距离(m)	0	2	4	6	8	10	12	14	16	18	20	22
MEMS (V/m)	401.87	401.22	418.45	416.32	456.93	511.43	549.13	575.03	552.92	460.72	369.00	361.08
EFA-300 (V/m)	397	399	406	421	454	505	549	576	546	466	368	337

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参考文献(18)

汪金刚, 林伟, 李健, 等. 电容式交变电场传感器与工频电场检测试验研究[J]. 传感器与微系统, 2010, 29(9): 21–23

WANG Jingang, LIN Wei, LI Jian, et al. Study on capacitive alternating electric field secsor detecting test on power frequency electric field[J]. Transducer and Microsystem Technologies, 2010, 29(9): 21–23

KAPLAN B Z. Duality of the electric covering field mill and the fluxgate magnetometer[J]. IEEE Transactions on Magnetics, 1998, 34(4): 2306–2315 doi: 10.1109/20.703870

SANTOS J C, TAPLAMACIOGLU M C, and HIDAKA K. Pockels high-voltage measurement system[J]. IEEE Transactions on Power Delivery, 2000, 15(1): 8–13 doi: 10.1109/61.847221

HORENSTEIN M N and STONE P R. A micro-aperture electrostatic field mill based on MEMS technology[J].Journal of Electrostatics, 2001, 51(1): 515–521.

RIEHl P S, SCOTT K L, MULLER R S, et al. Electrostatic charge and field sensors based on micromechanical resonators[J]. Journal of Microelectromechanical Systems, 2003, 12(5): 577–589 doi: 10.1109/JMEMS.2003.818066

BAHREYNI B, WIJEWEERA G, SHAFAI C, et al. Analysis and design of a micromachined electric-field sensor[J]. Journal of Microelectromechanical Systems, 2008, 17(1): 31–36 doi: 10.1109/JMEMS.2007.911870

KONBAYASHI Takeshi, OYAMA Syoji, TAKAHASHI Masaharu, et al. Microelectromichanical systems-based electrostatic field sensor using Pb (Zr, Ti)O₃ thin films[J]. Japanese Journal of Applied Physics, 2008, 47(9): 7533–7536 doi: 10.1143/JJAP.47.7533

PENG Chunrong, CHEN Xianxiang, BAI Qiang, et al. A novel high performance micromechanical resonant electrostatic field sensor used in atmospheric electric field detection[C]. Proceedings of 19th IEEE MEMS, Istanbul, Turkey, 2006: 698–701.

PENG Chunrong, YANG Pengfei, WEN Xiaolong, et al. Design of a novel micromachined non-contact resonant voltage sensor for power distribution systems[C]. Proceedings of IEEE Sensors 2014, Valencia, Spain, 2014: 978–981.

闻小龙, 彭春荣, 方东明, 等. 基于共面去耦结构的空间三维电场测量方法[J]. 电子与信息学报, 2014, 36(10): 2504–2508 doi: 10.3724/SP.J.1146.2013.01921

WEN Xiaolong, PENG Chunrong, FANG Dongming, et al. Measuring method of three dimensional atmospheric electric field based on coplanar decoupling structrure[J]. Journal of Electronics&Information Technology, 2014, 36(10): 2504–2508 doi: 10.3724/SP.J.1146.2013.01921

WEN Xiaolong, FANG Dongming, PENG Chunrong, et al. Three dimensional electric field measurement method based on coplanar decoupling structure[C]. Proceedings of IEEE Sensors 2014, Valencia, Spain, 2014: 582–585.

WEN Xiaolong, PENG Chunrong, FANG Dongming, et al. High performance electric field micro sensor with combined differential structure[J]. Journal of Electronics(China) , 2014, 31(2): 143–150 doi: 10.1007/s11767-014-3170-2

WANG Yu, FANG Dongming, FENG Ke, et al. A novel 2-dimensional electric field sensor based on in-plane micro rotary actuator[C]. Proceedings of IEEE Sensors 2014, Valencia, Spain, 2014: 1924–1927.

杨鹏飞, 彭春荣, 张海岩, 等. SOI微型电场传感器的设计与测试[J]. 电子与信息学报, 2011, 33(11): 2771–2774 doi: 10.3724/SP.J.1146.2010.01285

YANG Pengfei, PENG Chunrong, ZHANG Haiyan, et al. Design and testing of a SOI electric-field microsensor[J]. Journal of Electronics&Information Technology, 2011, 33(11): 2771–2774 doi: 10.3724/SP.J.1146.2010.01285

YANG Pengfei, PENG Chunrong, ZHANG Haiyan, et al. A high sensitivity SOI electric-field sensor with novel comb-shaped microelectrodes[C]. 16th International Conference on Solid-State Sensors, Actuators & Microsystems (tranducers’11), Beijing, China, 2011: 1034–1037. doi: 10.1109/TRANSDUCERS.2011.5969165.

YANG Pengfei, PENG Chunrong, FANG Dongming, et al. Design, fabrication and application of an SOI-based resonant electric field microsensor with coplanar comb-shaped electrodes[J]. Journal of Micromechaniics&Microengineering, 2013(23): 055002: 8pp.

高晋占. 微弱信号检测[M]. 第2版, 北京: 清华大学出版社, 2011: 190–191.

刘华麟. 高压输电线、变电站电磁场环境测量方法研究[D]. [博士论文], 重庆大学, 2005.

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