Power-frequency Electric Field Measurement Using a Micromachined Electric Field Sensor
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摘要: 该文基于高性能的MEMS电场敏感芯片研制出一种新型的工频电场测量系统。针对芯片调制被测电场后其输出信号的特征,采用正交相关检测原理提出一种可抑制背景干扰噪声的工频电场解调算法,设计出小型化、空间分辨力高的工频电场测量探头,并在基础上提出MEMS工频电场测量系统的系统级设计方案,成功实现了MEMS电场敏感芯片输出信号的无线采集、滤波、以及电场信号的高精度解调。高压输电线路下工频电场测量结果表明,MEMS工频电场测量系统与传统电场测量仪的测量结果具有良好的一致性。Abstract: A novel power frequency electric field measurement system based on high-performance MEMS electric field sensing chips is developed. Based on cross-correlation detection principle, a power frequency electric field demodulation algorithm of MEMS sensing chips that can inhibit background interference noise is proposed. And a small-scale, high-resolution electric field measuring probe is designed. Moreover, the system overall structure scheme is designed for implementation of high-accuracy demodulation electric field signals. The test result under power lines shows that the plotted curves of the developed MEMS system are consistent with Narda EFA-300.
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表 1 MEMS工频电场测量系统零点温度特性测试数据
温度(℃) –40 –30 –20 –10 0 10 20 30 40 50 零点(V/m) –1.39 –1.22 –1.13 –0.74 –1.22 –0.39 –0.04 –0.22 0.52 0.13 表 2 10 kV输电线路线下电场测试与计算数据
距离(m) 0 2 4 6 8 10 MEMS (V/m) 40.08 56.90 59.66 43.32 30.68 19.89 EFA-300 (V/m) 39.65 52.02 56.33 46.68 33.39 22.68 计算值(V/m) 44.0 51.6 53.4 44.8 33.6 24.3 表 3 同塔多回输电线路电场测试数据
距离(m) 0 2 4 6 8 10 12 14 16 18 20 22 MEMS (V/m) 401.87 401.22 418.45 416.32 456.93 511.43 549.13 575.03 552.92 460.72 369.00 361.08 EFA-300 (V/m) 397 399 406 421 454 505 549 576 546 466 368 337 -
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