覆膜浸渍扩散阴极表面微区电子发射像研究

阴生毅; 任峰; 卢志鹏; 张永清; 张申金; 杨峰; 卫东; 邯娇; 李阳

doi:10.11999/JEIT171000

覆膜浸渍扩散阴极表面微区电子发射像研究

doi: 10.11999/JEIT171000

阴生毅^1, ,,
任峰^{1, 2},
卢志鹏^{1, 2},
张永清¹,
张申金³,
杨峰³,
卫东⁴,
邯娇¹,
李阳¹

1.
中国科学院电子学研究所高功率微波源与技术实验室北京 100190
2.
中国科学院大学北京 100039
3.
中国科学院理化技术研究所功能晶体与激光技术重点实验室北京 100190
4.
北京中科科仪股份有限公司北京 100190

基金项目: 国家重大科学仪器设备开发专项(2012YQ120048)

详细信息

作者简介:
阴生毅：男，1964年生，研究员，研究方向为大电流密度阴极及其发射机理

任峰：男，1992年生，硕士生，研究方向为热扩散阴极微区热电子发射特征及阴极发射材料

卢志鹏：男，1993年生，博士生，研究方向为高性能热场发射阴极及其发射机理

张永清：女，1965年生，研究员，研究方向为微波衰减材料、大功率速调管制管工艺及技术

张申金：男，1978年生，副研究员，研究方向为全固态激光技术及非线性频率变换技术

杨峰：男，1983年生，副研究员，研究方向为全固态激光及其频率变换技术

卫东：男，1988年生，工程师，研究方向为电子光学

邯娇：女，1986年生，中级工程师，研究方向为可靠性热子材料与工艺

李阳：男，1990年生，初级工程师，研究方向为阴极制备工艺

通讯作者:
阴生毅　 ysy210@163.com

中图分类号: O462
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出版历程
- 收稿日期: 2017-10-25
- 修回日期: 2018-06-14
- 网络出版日期: 2018-07-30
- 刊出日期: 2018-10-01

Study on Electron Emission Phenomenon of the Surface Micro Area of Coated Impregnated Dispenser Cathode

Shengyi YIN^{1
, ,},
Feng REN^{1, 2},
Zhipeng LU^{1, 2},
Yongqing ZHANG¹,
Shenjin ZHANG³,
Feng YANG³,
Dong WEI⁴,
Jiao HAN¹,
Yang LI¹

1.
Key Laboratory of High Power Microwave Sources and Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
2.
University of Chinese Academy of Sciences, Beijing 100039, China
3.
Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China
4.
KYKY Technology Co., Ltd, Beijing 100190, China

Funds: The National Instrumentation Program of China (2012YQ120048)

摘要

摘要: 覆膜对浸渍扩散热阴极表面电子发射的影响一直是热阴极研究领域的重点课题。该文采用最新研制的深紫外激光光发射电子显微镜/热发射电子显微镜(DUV-PEEM/TEEM)，对一半覆膜、另一半未覆膜的浸渍扩散阴极试样作了1150 ℃×2 h激活，并对其表面微区的热电子发射像及其随温度的变化作了比较。结果发现，两种阴极的热电子发射均主要位于孔隙及其邻近颗粒边缘；随温度升高，未覆膜阴极发射主要集中于孔隙内及周边有限区域内，发射面积增量较小，覆膜则使阴极有效发射区域得以由孔隙及其边缘向距孔隙更远的区域延伸，发射面积大幅增加。上述结果首次给出了覆膜浸渍扩散阴极微区的电子发射特征，对于理解该类型阴极发射机理有一定参考价值。
- 覆膜浸渍扩散阴极 /
- 电子发射 /
- 微区 /
- 光发射电子显微镜
Abstract: The impact on impregnated cathode electronic emission, when it is coated by films, is an important studied content in the field of thermionic cathode. A cathode sample is evenly split by impregnated dispenser cathode and coated impregnated dispenser cathode. The sample is activated at 1150 ℃ in the Deep UltraViolet laser Photo- and Thermal- Emission Electron Microscope system (DUV-PEEM/TEEM) for 2 hours. In this system, the micro- electron emission phenomenon of two cathode and its changes with temperature are compared and studied directly. The results show that the electronic emission of both impregnated cathode and coated impregnated cathode are mainly located at the pores and the edge of the adjacent particles; Along with the rise of cathode's temperature, the cathode emission without coating anything is still mainly focused on the pores and nearby narrow regions on cathode surface, that the emission area changed a little. However, for the coated impregnated dispenser cathode, the effective emission area is extended from the pores and its edge to the area far away from the pores. These results for the first time give the electron emission characteristics for impregnated cathode coated with film, which have certain reference value to understand the emission mechanism of this cathode.
- Impregnated dispenser cathode /
- Electron emission /
- Surface micro area /
- Photoemission electron microscope

HTML全文

图 1 未覆膜阴极与覆膜阴极分界处UV-PEEM图像

下载: 全尺寸图片幻灯片

图 2 阴极微区680 ℃ TEEM像与相应的DUV-PEEM像，视野范围均为100 μm

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图 3 阴极表面TEEM像，视野范围均为50 μm

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图 4 未覆膜阴极与覆膜阴极的I-V曲线

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图 5 未覆膜阴极与覆膜阴极分界处的700 ℃ TEEM图像，视野范围320 μm

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