短沟DMOS阈值电压模型
A Threshold Voltage Model of the Short Channel DMOS
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摘要: 该文提出了短沟DMOS阈值电压模型。基于沟道区耗尽电荷的二维分布,计算沟道区中耗尽电荷总量,由此给出短沟DMOS阈值电压模型的计算式。该模型的解析解与二维仿真器MEDICI的数值解吻合。分析表明,DMOS沟道长度小于0.80m,就应考虑短沟效应。
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关键词:
- DMOS; 阈值电压; 短沟效应
Abstract: A threshold voltage model of the short channel DMOS (Double-Diffusion Metal-Oxide- Semiconductor) is proposed. Based on the 2-D distribution of channel depletion charge, the channel depletion charge is calculated and the mathematical expression of the threshold voltage model of the short channel DMOS is obtained. The results of the model agree well with those of the 2-D simulator MEDICI. The analysis shows that the effect of short channel should be considered when the channel length is less than 0.80m. -
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