微波气体击穿过程的模拟计算
THE SIMULATION FOR MICROWAVE PLASMA BREAKDOWN PROCESS
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摘要: 本文利用流体模型,将无外加恒定磁场的等离子体当作各项同性的有耗媒质,求得圆柱腔结构中的微波场分布。耦合电子、离子运动的流体方程,对微波等离子体的初始形成过程进行了数值模拟计算。结果表明,在电离的初始阶段,电子、离子密度分布与场分布同步。同时,存在一关键电子密度。超过此密度后,微波场在表面快速衰减,气体电离主要在表面进行。
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关键词:
- 微波; 等离子体; 流体方程; 圆柱波导
Abstract: Using the fluid model and making the plasma as isotropic medium, the microwave field in a cylindrical cavity is obtained. Coupled with fluid equations for the electron and ion motion, the microwave discharge courses are calculated. The results show that the density distribution of ion and electron is similar to electric field distribution. Also, a critical electron density is exist. Above this density, microwave field will damp rapidly, so the gas ionization is mainly on the surface. -
Moisan M, Zakrzewski Z. Plasma sources based on the propagation of electromagnetic surface waves J Phys. D, 1991, 24(7): 1025-1048.[2][2][3]Rakem Z, Leprince P, Marec J. Modelling of a nucrowave discharge created by a standing surface wave[J].J Phys. D.1992, 25(6):953-959[4]Hunermann L, Meyer R, et al. Excitation of an excimer laser with microwave resonator[J].SPIE.1991,1503:134-138[5]Hirch M N, Oskam H J. Gaseous Electronics. Vol. 1. New York: Academic Press, lnc. 1978, Chapter 3: 173-217. -
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