非晶硅薄膜的应用前景
PROSPECTS FOR APPLICATION OF a-Si:H FILMS
-
摘要: 本文评述并探讨了-Si:H薄膜在电子学领域的种种应用。-Si:H太阳电池是非晶硅薄膜的最重要的器件,目前的主要研究课题仍是改进材料性质和器件参数,以提高电池的能量转换效率。利用-Si:H灵敏的光敏效应记录图象信息,可能有广阔的应用前景(如用于摄象管和静电复印等)。以-Si:H场效应管为基础的集成电路,易于实现大面积和结构的立体化,因此有很大吸引力。-Si:H FET驱动的液晶大面积显示和材料本身的场致发光在大面积平面显示中直接应用的可能性亦引人注目。以整流、检测等为目的的其它-Si:H二极管也都具有相当的价值。
-
关键词:
Abstract: The various applications of a-Si:H films are discussed in this paper.a-Si:H solar cells are the most important devices of amorphous silicon, and the major subject at present, is to improve the device parameters, especially to increase the conver-sion efficiency. The prospect may be bright for its photosensitive effects to record and store picture informations on a-Si:H films (e.g. image pick-up tube and electrophotography). The a-Si:H integrated circuits may have attractions for the easier realization of its three-dimensional structure and large area. The large area display of LC driven by a-Si:H FETs and the probability of using electroluminecence of a-Si:H for the same purpose merits attention. Other a-Si:H diodes, such as a-Si:H rectifier and detector, are also quite valuable. -
奚中和等,无线电电子学汇刊,1981年,第3, 4期,第74页.[3]S. R. Ovshinsky, Nature, 276(1978), 482.[4]Y. Tawada et al., Jap. J. Appl. Phys., 20(1981), 213.[5]G. Nakamura et al., Proc. 9th Int. Conf. on Amorphous and Liquid Semiconductors, Grenoble,1981, C4-483.[6]杨大同,太阳能学报,3(1982), 241.[7]林璇英等,无线电电子学汇刊,1982年,第3期,第7页.[8]Y. L. Dalal, IEEE Trans. on ED, ED-27(1980), 662.[9]D. E. Carlson, J. Non-Crys. Solids, 35/36(1980), 707.[10]Y. Imamura, Appl. Phys. Lett.,35(1979), 349.[13]I. Shimizu et al., J. Non-Cryst. Solids, 35/36(1980), 773.[14]D. L. Staebler et al., Appl. Phys. Lett., 31(1977), 292.[18]A. J. Snell, Appl. Phys., 24(1981), 357.[19]D. E. Carlson et al., RCA Rev., 38(1977), 211.[20]R. A. Gibson, Appl. Phys., 21(1980), 307.[21]毛友德等,中国电子学会第三届年会论文集,1982年,第273页. -
计量
- 文章访问数: 1563
- HTML全文浏览量: 87
- PDF下载量: 336
- 被引次数: 0
下载:
