砷化镓共面波导内部微波信号的电光取样检测
ELECTROOPTIC SIMPLING OF INTERNAL MICROWAVE SIGNALS IN GaAsCOPLANAR WAVEGUIDES
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摘要: 本文报道了共轴反射式电光取样系统。该系统时间分辨率不低于20ps,空间分辨率不低于3m。用它检测了砷化镓共面波导内部的微波信号。这套系统将被应用于砷化镓高速集成电路内部特性的在片检测。Abstract: A coaxial reflection-mode electrooptic sampling system is presented. This system has a temporal resolution less than 20 ps and a spatial resolution less than 3m. The internal microwave signals in GaAs coplanar waveguides have been probed by the system. This system will be apply to on-wafer tests of internal characters of GaAs high-speed integrated circuits.
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Weingarten K J, Rodwell M J W, Bloom D M. IEEE J. of QE, 1988, QE-24(2): 198-220.[2]Weisenfeld J, M. IBM J. Res. Develop., 1990, 34(2/3): 141-161.[3]Shinagawa M, Magatsuma T. Electron[J].Lett.1990, 26(17):1341-1343[4][4][5]Nagatsuma T, Shinagawa M. Electron. Lett., 1991. 27(21): 1904-1905. -
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