摘要:
本文介绍了一种适用于量测热阴极次级发射特性的扫描电子探针法,原电子探束束斑直径为50100m,束流小于10-7A,原电子能量不大于3kV。该装置能定点测量热阴极表面上感兴趣点的次级发射系数与原电子能量间的关系曲线(-Ep);也能以扫描方式在短时间内测出整个热阴极表面的次级发射分布,从而求得次级发射的定量分布曲线(f-)。该装置在电视制式的扫描方式工作时,能观察热阴极表面的次级发射图象。 对纯镍样品的测量表明:该装置具有比单枪定点法更多的优点和更高的精度。由于该装置简便灵活,便于与热阴极研究的特殊需要相结合,因此,可望在热阴极的研究中发挥作用。
Abstract:
For this probe, the beam spot diameter of the primary electron beam is 50-100m, the primary beam current is lower than 10-7A, and the energy of the primary electron (Ep) can be varied from 200 eV to 3 keV.By use of this probe, the secondary emission coefficient () versus Eq curve and the secondary emission distribution over the cathode surface can be measured, and the secondary emission image of the cathodes can also be displayed. Finally, the secondary emission of the pure nikel sample and impregnated dispenser cathode are measured.
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