扫描电子束曝光机复合物镜的研究与设计
RESEARCH AND DESIGN ON THE COMBINED OBJECTIVE LENSES FOR ELECTRON BEAM LITHOGRAPHY SYSTEMS
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摘要: 在综合研究已有的各种复合物镜(如移动物镜、变轴物镜和摆动物镜等)的基础上,本文对复合物镜的一般理论进行了探讨,推导了普遍化计算公式,并提出新的复合物镜(弯曲物镜)系统。采用解析函数近似表示系统场分布,对弯曲物镜系统象差进行了理论分析,并设计出一个实际系统。数值计算结果给出该系统在55mm2扫描场内,束孔径角5mrad和能散2.5eV下,最大彗差0.005m,横向色差0.001m。Abstract: Based on the synthetic study of the previous magnetic combined objective lenses, such as MOL (moving objective lens), VAL (variable axis lens), SOL (swinging objective lens) etc; the general theory of combined objective lenses is approached, and a set of general formulas is presented. A new combined objective lens called Bent Objective Len (BOL) is proposed for improving the optical properties in electron beam systems. Using the analytical functions of the magnetic lens field and electron ray, the aberration analysis of the BOL system is performed, and a practical BOL system is also designed. The numerically computational results indicate that this system offers extremely small coma and transverse chromatic aberrations. At the corner of a 5 X 5mm2 deflection field with a 5 mrad aperture angle and 0.0001 beam voltage ripple, the beam blur caused by coma is 0.00.5 m nad the transverse chromatic aberration is 0.001 m.
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