阴极-敏感膜复合型真空微电子压力传感器研究
RESEARCH ON CATHODE-ON-MEMBRANE VACUUM MICROELECTRONIC PRESSURE SENSOR
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摘要: 该文提出了阴极-敏感薄膜复合结构的新型真空微电子压力传感器,并研制出了阴极-敏感薄膜复合结构,对硅薄膜在外力作用下产生的形变及其应力分布进行了计算机模拟计算,并讨论了薄膜结构参数对其敏感特性的影响。
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关键词:
- 真空微电子; 压力传感器
Abstract: This paper proposes a novel cathode-on-membrane vacuum microelectronic pressure sensor. The cathode-on-membrane structure has been fabricated. The properties of the silicon membrane under pressure are simulated, and the effects of the parameters of membrame structure on the sensitivity are discussed. -
Jiang J C,White R C,Allen P K.Digest of technical papers of 1991 international conference on solid-state sensors and actuators: 238-240.[2]Xia S H,Liu J,Chen F C,Han J H,Cui D F.J.Vac.Sci.Technol,1997,B-15(4): 1573-1576.[3]陶新昕,夏善红,陈绍凤.中国电子学会真空电子学分会第十一届学术年会论文集,北京:1997,335 337.[4]Xia S H,Liu J.J.Vac.Sci.Technol,1998,B-16(3): 1226-1232. -
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