七级偏转象差中的Trilemma效应
THE TRILEMMA EFFECT IN SEVENTH-ORDER DEFLECTION ABERRATION
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摘要: Trilemma效应是偏转系统实现自会聚的一个重要判据,对高级偏转象差的校正,需要考虑高阶Trilemma效应的影响,本文从多极场偏转象差校正理论出发,应用区域分割的方法,对直至七阶的Trilemma效应进行了分析,给出了各阶Trilemma常数的表达式,其中七阶Trilemma常数可以作为大偏转角偏转象差校正的判据。Abstract: Trilemma effect is an important criteria for the self-convergence deflection system. The influence of the higher order Trilemma effects should be taken into account for the correction of the higher-order deflection aberrations. In this paper, up to the seventh-order Trilemma effects are analyzed with region-cutting by means of the correction theory of the multipole field deflection aberration. The expressions of the various order of Trilemma constant are given, in which the seventh-order Trilemma constant can be used as a criteria of the deflection aberration correction at large deflection angle
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