Emission Performance of Scandate Cathodes Prepared by Pulse Laser Deposition
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摘要: 为提高阴极的发射性能以满足新型器件的需求,该文利用脉冲激光沉积技术制备了一种覆W+BaO- Sc2O3-SrO薄膜的浸渍扩散阴极。实验测得了该阴极在不同温度下的伏安特性曲线,并探讨了发射机制。结果表明,在1100C工作温度下,该阴极的零场发射电流密度达到305.5 A/cm2;阴极表面形成的Ba-Sc-Sr-O活性层是阴极获得高发射性能的主要原因。文章还利用半导体模型解释了该阴极的非正常肖特基效应。Abstract: In order to improve the emission performance of cathodes to meet the demands of new type devices, this paper develops a new-type scandate cathode coated with W+BaO-Sc2O3-SrO film prepared by Pulse Laser Deposition (PLD) technology. The experiment obtains emission current characteristics measured as a function of voltage and temperature and analyzes the emission mechanism. The test results indicate that at 1100C the current density of the new cathode reaches 305.5 A/cm2; and the layer of Ba-Sc-Sr-O is the key to this excellent performance. The abnormal Schottky effect that the cathode appears is also investigated by using semiconductor model.
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