Abstract: Because of its compressed sampling property, Compressive Sensing (CS) has wide application to high resolution imaging. But as a parametric imaging method, CS based imaging methods are sensitive to position error. Position error may cause defocusing, range migration, or even can not imaging. This paper concerns the analysis and compensation of trajectory deviations in airborne spotlight Synthetic Aperture Radar (SAR). A motion compensated CS SAR imaging scheme is proposed based on the sensor measured data. An additional item is introduced into the sparse matrix to achieve the compensation of space invariant motion error. This method can not only get enough information for imaging using few measure position and data, but also reduce the affection of motion error on image quality, achieve high resolution imaging.