一种用于电容型体硅微陀螺的低噪声读出电路芯片

尹韬; 杨海钢; 张翀; 吴其松; 焦继伟; 宓斌玮

doi:10.3724/SP.J.1146.2008.01763

一种用于电容型体硅微陀螺的低噪声读出电路芯片

doi: 10.3724/SP.J.1146.2008.01763

尹韬,
杨海钢^①,,
张翀,
吴其松^①②,
焦继伟^③,
宓斌玮^③

计量
- 文章访问数: 3055
- HTML全文浏览量: 105
- PDF下载量: 792
- 被引次数: 0
出版历程
- 收稿日期: 2008-12-22
- 修回日期: 2009-06-22
- 刊出日期: 2010-01-19

A Low-Noise Readout Circuit for Bulk Micro-Machined Capacitive Gyroscope

摘要

摘要: 读出电路位于微传感器系统信号通路的最前端，是决定系统性能的关键因素。本文针对音叉式体硅微陀螺的具体应用，提出了一种低噪声电容读出电路，芯片采用斩波技术降低了电路的低频1/f噪声、失调电压以及参考电压失配的影响，提高了读出电路的分辨率和动态范围；提出一种噪声电荷转移的分析方法，用于分析和预测读出电路的噪声性能；建立一种简化的微陀螺传感器仿真模型，用于模拟读出电路对微传感器的响应。读出电路在0.35 m 2P4 M 标准CMOS工艺下设计流片，并与微传感器进行了联合应用，芯片面积为22.5 mm2，在5 V电源电压，100 kHz的时钟频率下，实现了4 aF的电容分辨率和94 dB的动态范围。
- 微陀螺; 读出电路; 低噪声; 斩波
Abstract: Readout circuit is a key factor determining the performance of MEMS gyroscope system, being at the forefront of the signal loop. This paper presents a low-noise readout circuit for a bulk micromachined tuning fork gyroscope. Using the chopper technique, the circuit can improve the resolution and dynamic range by canceling 1/f noise and offset of the amplifier, and mismatch between reference voltages. Theory predicting the resolution of the readout circuit is given which is based on noise charge transfer method. In order to simulate the response of the circuit with the vibrating gyroscope, a simplified time-varying capacitor model is also proposed. The chip measures 22.5 mm2 in a standard 0.35 m 2P4M CMOS process. Chip tests with the MEMS gyroscope prove the validity of the concepts proposed and show that the readout circuit achieves a resolution of 4 aF with 94 dB dynamic range from a single 5 V supply.

HTML全文

参考文献(1)

Bryzek J, Roundy S, and Bircumshaw B, et al.. MarvelousMEMS-Advanced IC sensors and microstructures for highvolume applications[J]. IEEE Circuits and Devices Magazine,2006, 22(2): 8-28.[2]Falconi C, Martinelli E, and Natale C D, et al.. Electronicinterfaces[J]. Sensors and Actuators, 2007, B(121): 295-329.[3]Wu Jiang-feng, Fedder G K, and Carley L R. A low-noiselow-offset capacitive sensing amplifier for a50g/ Hz monolithic CMOS MEMS accelerometer[J].IEEE Journal of Solid-State Circuits.2004, 39(5):722-730[4]Saukoskia M, Aaltonena L, and Salob T, et al.. Interface andcontrol electronics for a bulk micromachined capacitivegyroscope[J]. Sensors and Actuators, 2008, A(147): 183-193.[5]Zhang Xiao-ling and Chan P K, A low-power switchedcapacitorcapacitive transducer with high resolution. IEEETransactions on Instrumentation and Measurement, 2008,57(7): 1492-1499.[6]Huang Xiao-gang, Chen Wen-yuan, and Liu Wu, et al.. Highresolution differential capacitance detection scheme for microlevitated rotor gyroscope[J].Chinese Journal of Aeronautics.2007, 20(6):546-551[7]Yazdi N, Mason A, and Najafi K, et al.. A generic interfacechip for capacitive sensors in low-power multi-parametermicrosystems[J]. Sensors and Actuators, 2000, A(84):351-361.[8]Li X and Meijer G C M. Measurement techniques for smartsensor interfaces implemented in cmos technology[C].Proceedings of the IEEE 6th International Conference onASIC (ASICON), Shanghai, China, Oct. 24-27, 2005, 2:681-684.[9]Zhang J and Mason A. Characterization of a configurablesensor signal conditioning circuit for multi-sensormicrosystems[C]. 3rd IEEE Conference on SensorsProceedings, Vienna, Austria, Oct. 24-27, 2004, 1: 198-201.[10]Chen Yong, Jiao Ji-wei, and Dong Lin-xi, et al..Micromachined bar-structure gyroscope with high q-factorsfor both driving and sensing mode at atmospheric pressure[C].2nd IEEE Conference on Sensors Proceedings, Toronto,Canada, Oct, 2003, 1: 461-465.[11]ENZ C C and Temes G C. Circuit techniques for reducing theeffects of op-amp imperfections: Autozero, Chopper,Correlated double sampling[J].Proc. IEEE.1996, 84(11):1584-1614[12]Bilotti A and Monreal G. Chopper-stabilized amplifiers witha track-and-hold signal demodulator[J].IEEE Transactionson Circuits and SystemsI: Fundamental Theory andApplications.1999, 46(4):490-495[13]Rodjegard H and Loof A. A differential charge-transferreadout circuit for multiple output capacitive sensors[J].Sensors and Actuators, 2005, A(119): 309-315.[14]Yin Tao, Yang Hai-gang, and Zhang Chong, et al.. Alow-noise readout circuit for MEMS vibratory capacitivegyroscope[C]. Proceedings of the 3rd IEEE Int. Conf. onNano/Micro Engineered and Molecular Systems, Sanya,China, Jan. 6-9, 2008, 1: 124-127.

施引文献

资源附件(0)

访问统计