一种闭环自激式驱动的硅微机械电场传感器

熊幼芽; 彭春荣; 夏善红

doi:10.3724/SP.J.1146.2008.01527

一种闭环自激式驱动的硅微机械电场传感器

doi: 10.3724/SP.J.1146.2008.01527

熊幼芽^{①②;彭春荣},
彭春荣,
夏善红

基金项目:

国家863计划项目(2006AA04Z347)资助课题

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出版历程
- 收稿日期: 2008-11-17
- 修回日期: 2009-04-27
- 刊出日期: 2009-11-19

Electric Field Micro-sensor with a Closed-loop Autonomous Driving Circuit

摘要

摘要: 该文提出了一种闭环自激式驱动的微型电场传感器方案。利用自动增益控制的原理实现闭环自激驱动，使得微传感器能够始终工作在谐振状态，且振动幅度保持稳定。用matlab-simulink工具对系统进行了仿真，结果表明，当传感器的谐振频率发生0.5%的漂移时，系统可以重新捕捉并锁定到新的谐振频率，和开环驱动方案相比，传感器振幅的衰减度从30%降低到0.1%之内，灵敏度从缩减50%改进到缩减0.1%之内。
- 微型电场传感器; 闭环; 自激驱动电路
Abstract: A new micromechanical electric field sensor system with a closed-loop autonomous driving circuit is designed and simulated. The closed-loop autonomous driving circuit, which uses the principle of auto-gain-control, keeps the micro sensor working in the resonance state, and keeps the stable resonance amplitude. The simulation result shows, compared with the open-loop driving mode, the sensor can catch the new resonance frequency, the attenuation of libration amplitude is reduced from 30% to 0.1%, and the attenuation of the sensitivity of the sensor is reduced from 50% to 0.1%, when the resonance frequency changes 0.5%.

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