基于微带环缝谐振器的2.45GHz小功率微波等离子体源的建模与仿真
doi: 10.3724/SP.J.1146.2006.00263
Modeling and Simulation of 2.45GHz Low-Power Microwave Plasma Source Based on a Microstrip Split-Ring Resonator
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摘要: 该文介绍了一种基于微带环缝谐振器的2.45GHz小功率微波等离子体源的建模方法。根据半波长终端开路谐振器的特性，通过选择合适的缝隙宽度和偏转角度、介质基片的介电常数等，使微带环缝谐振器的品质因数最大，同时与馈电端良好匹配。研究表明，实验结果与仿真结果基本吻合，这为小功率微型微波等离子体源的进一步研究提供了理论基础。
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关键词:
- 微波等离子体源;微带环缝谐振器;品质因数
Abstract: A modeling of 2.45GHz low-power microwave plasma source based on a microstrip split-ring resonator is presented in this paper. According to characteristics of half-wavelength resonator with a open circuit at the end, the parameters such as discharge gap, angular position of the feeding point and permittivity of dielectric substrate are optimized to make the quality factor of microstrip split-ring resonator reach maximum and match the input impedance of the resonator to that of the power supply. The research indicates that experimental results are found to be in good agreement with simulated results. The theoretical basis is gained for further research of low-power microwave microplasma. -
Bilgic A M, Engel U, Voges E, Kuckelheim M, and Broekaert J A C. A new low-power microwave plasma source using microstrip technology for atomic emission spectrometry[J], Plasma Sources Sci. Technol., 2000, 9(1): 1-4.[2]Iza F and Hopwood J A. Low-power microwave plasma source based on a microstrip split-ring resonator[J].IEEE Trans. on Plasma Science.2003, 31(4):782-787[3]Bilgic A M, Voges E, Engel U, and Broekaert J A C. A low-power 245GHz microwave induced helium plasma source at atmospheric pressure based on microstrip technology[J]., J. Anal. Atomic Spectrometry.2000, 15(6):579-580[4]Iza F and Hopwood J. Split-ring resonator microplasma: microwave model, plasma impedance and power efficiency [J].Plasma Sources Sci. Technol.2005, 14(2):397-406 -
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