IC缺陷轮廓多分形特征研究
doi: 10.3724/SP.J.1146.2005.00755
The Study of Multifractal Characterization of IC Defect Outline
-
摘要: IC真实缺陷轮廓曲线的形状特征对集成电路成品率预报及故障分析有重要影响。该文提出缺陷轮廓曲线具有多分形特征，以某一真实缺陷为例，用小波变换模极大(WTMM)的方法估计了其轮廓曲线参数方程的多分形谱，该结果为硅片表面缺陷的精细表征及其计算机模拟作了有益探索。Abstract: The shapes of real defect outline usually play an extremely important role in the yield prediction and inductive fault analysis of Integrated Circuits (IC). In this paper, the multifractal characterizations of real defect outlines are discussed, and the multifractal spectrum of one typical real defect outline is estimated by the method of Wavelet Transform Modulus Maximum(WTMM), the results obtained in this paper will be useful for a fine characterization and computer simulation of the defects on wafer.
-
[1] Hess Cristopher and Strole Albrecht. Modeling of real defect outlines for defect size distribution and yield prediction. Microelectronic Test Structures, 1993(ICMTS 1993). Proceedings of the 1993 International Conference on, 22-25 March, 1993: 75-81. [2] 姜晓鸿, 郝跃. IC制造中真实缺陷轮廓的分形特征. 半导体学报, 1998, 19(2): 123-126. [3] Jens Feder, Fractals. Plenum Press, New York and London. 1989: 67-85. [4] Muzy J F, Bacry E, and Arneodo A. Multifractal formalism for fractal signals: The structure-function approach versus the wavelet-transform modulus-maximum method[J].Phy. Rev. E.1993, 47(2):875-884 [5] MallatS著, 杨力华, 戴道清, 黄文良等译. 信号处理的小波导引. 北京: 机械工业出版社, 2002: 145-163. [6] 傅强. 多分形特性的子波分析及其在Rayleigh Benard对流温度信号中的应用. 工程力学, 2002, 19(2): 100-109. Fu Qiang. Wavelet analysis of multifractal characteristics and its application to processing temperature data in Rayleigh- Benard convection. Engineering Mechanics, 2002, 19(2): 100- 109. [7] 马瑞恒等. 基于小波变换模极大的爆破震动信号奇异谱分析.爆炸与冲击, 2004, 24(6): 529-533. Mang Rui-heng, et al.. The singular spectrum analysis of blasting vibration signal based on WTMM. Explosion and Shock Waves, 2004, 24(6): 529-533. [8] Muzy J F, Bacry E, and Arneodo A. The multifractal formalism revisited with wavelets[J].International J. of Bifurcation and Chaos.1994, 4(2):245-302 -
计量
- 文章访问数: 2940
- HTML全文浏览量: 104
- PDF下载量: 738
- 被引次数: 0
下载:
