覆膜浸渍扩散阴极表面微区电子发射像研究

阴生毅; 任峰; 卢志鹏; 张永清; 张申金; 杨峰; 卫东; 邯娇; 李阳

doi:10.11999/JEIT171000

覆膜浸渍扩散阴极表面微区电子发射像研究

doi: 10.11999/JEIT171000

阴生毅^1, ,,
任峰^{1, 2},
卢志鹏^{1, 2},
张永清¹,
张申金³,
杨峰³,
卫东⁴,
邯娇¹,
李阳¹

1.
中国科学院电子学研究所高功率微波源与技术实验室北京 100190
2.
中国科学院大学北京 100039
3.
中国科学院理化技术研究所功能晶体与激光技术重点实验室北京 100190
4.
北京中科科仪股份有限公司北京 100190

基金项目: 国家重大科学仪器设备开发专项(2012YQ120048)

详细信息

作者简介:
阴生毅：男，1964年生，研究员，研究方向为大电流密度阴极及其发射机理

任峰：男，1992年生，硕士生，研究方向为热扩散阴极微区热电子发射特征及阴极发射材料

卢志鹏：男，1993年生，博士生，研究方向为高性能热场发射阴极及其发射机理

张永清：女，1965年生，研究员，研究方向为微波衰减材料、大功率速调管制管工艺及技术

张申金：男，1978年生，副研究员，研究方向为全固态激光技术及非线性频率变换技术

杨峰：男，1983年生，副研究员，研究方向为全固态激光及其频率变换技术

卫东：男，1988年生，工程师，研究方向为电子光学

邯娇：女，1986年生，中级工程师，研究方向为可靠性热子材料与工艺

李阳：男，1990年生，初级工程师，研究方向为阴极制备工艺

通讯作者:
阴生毅　 ysy210@163.com

中图分类号: O462
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出版历程
- 收稿日期: 2017-10-25
- 修回日期: 2018-06-14
- 网络出版日期: 2018-07-30
- 刊出日期: 2018-10-01

Study on Electron Emission Phenomenon of the Surface Micro Area of Coated Impregnated Dispenser Cathode

Shengyi YIN^{1
, ,},
Feng REN^{1, 2},
Zhipeng LU^{1, 2},
Yongqing ZHANG¹,
Shenjin ZHANG³,
Feng YANG³,
Dong WEI⁴,
Jiao HAN¹,
Yang LI¹

1.
Key Laboratory of High Power Microwave Sources and Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
2.
University of Chinese Academy of Sciences, Beijing 100039, China
3.
Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China
4.
KYKY Technology Co., Ltd, Beijing 100190, China

Funds: The National Instrumentation Program of China (2012YQ120048)

摘要

摘要: 覆膜对浸渍扩散热阴极表面电子发射的影响一直是热阴极研究领域的重点课题。该文采用最新研制的深紫外激光光发射电子显微镜/热发射电子显微镜(DUV-PEEM/TEEM)，对一半覆膜、另一半未覆膜的浸渍扩散阴极试样作了1150 ℃×2 h激活，并对其表面微区的热电子发射像及其随温度的变化作了比较。结果发现，两种阴极的热电子发射均主要位于孔隙及其邻近颗粒边缘；随温度升高，未覆膜阴极发射主要集中于孔隙内及周边有限区域内，发射面积增量较小，覆膜则使阴极有效发射区域得以由孔隙及其边缘向距孔隙更远的区域延伸，发射面积大幅增加。上述结果首次给出了覆膜浸渍扩散阴极微区的电子发射特征，对于理解该类型阴极发射机理有一定参考价值。
- 覆膜浸渍扩散阴极 /
- 电子发射 /
- 微区 /
- 光发射电子显微镜
Abstract: The impact on impregnated cathode electronic emission, when it is coated by films, is an important studied content in the field of thermionic cathode. A cathode sample is evenly split by impregnated dispenser cathode and coated impregnated dispenser cathode. The sample is activated at 1150 ℃ in the Deep UltraViolet laser Photo- and Thermal- Emission Electron Microscope system (DUV-PEEM/TEEM) for 2 hours. In this system, the micro- electron emission phenomenon of two cathode and its changes with temperature are compared and studied directly. The results show that the electronic emission of both impregnated cathode and coated impregnated cathode are mainly located at the pores and the edge of the adjacent particles; Along with the rise of cathode's temperature, the cathode emission without coating anything is still mainly focused on the pores and nearby narrow regions on cathode surface, that the emission area changed a little. However, for the coated impregnated dispenser cathode, the effective emission area is extended from the pores and its edge to the area far away from the pores. These results for the first time give the electron emission characteristics for impregnated cathode coated with film, which have certain reference value to understand the emission mechanism of this cathode.
- Impregnated dispenser cathode /
- Electron emission /
- Surface micro area /
- Photoemission electron microscope

HTML全文

图 1 未覆膜阴极与覆膜阴极分界处UV-PEEM图像

下载: 全尺寸图片幻灯片

图 2 阴极微区680 ℃ TEEM像与相应的DUV-PEEM像，视野范围均为100 μm

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图 3 阴极表面TEEM像，视野范围均为50 μm

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图 4 未覆膜阴极与覆膜阴极的I-V曲线

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图 5 未覆膜阴极与覆膜阴极分界处的700 ℃ TEEM图像，视野范围320 μm

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参考文献(18)

ZALM P and VAN STRATUM A J A. Osmium dispenser cathodes[J]. Philips Technical Review, 1966, 27(3/4): 69–75.

GREEN M C, SKINNER H B, and TUCK R A. Osmium-tungsten alloys and their relevance to improved M-type cathodes[J]. Applications of Surface Science, 1981, 8(1-2): 13–35 doi: 10.1016/0378-5963(81)90004-0

ARES FANG C S and MALONEY C E. Surface studies of Os/Re/W alloy-coated impregnated tungsten cathodes[J]. Journal of Vacuum Science&Technology A Vacuum Surfaces&Films, 1990, 8(3): 2329–2332 doi: 10.1116/1.576758

ZHANG Honglai, LIU Yanwen, ZHANG Mingchen, et al. Emission and surface characteristic of ternary alloy Ir/Re/W-coated impregnated tungsten cathodes[J]. Applied Surface Science, 2005, 251(1-4): 130–133 doi: 10.1016/j.apsusc.2005.03.162

SWARTZENTRUBER P, BALK T J, ROBERTS S, et al. Microstructural influence of OsRu thin films on dispenser cathodes[C]. IEEE Vacuum Electronics Conference, Monterey, USA, 2012: 163–164.

SWARTZENTRUBER P D, DETISCH M J, and BALK T J. Composition and work function relationship in Os–Ru–W ternary alloys[J]. Journal of Vacuum Science&Technology A Vacuum Surfaces&Films, 2015, 33(2): 021405 doi: 10.1116/1.4905499

阴生毅, 张永清, 张洪来, 等. 一种阴极三元合金膜及制备覆膜浸渍扩散阴极的方法[P]. 中国, ZL200710118004, 2007.

YIN Shengyi, ZHANG Yongqing, ZHANG Honglai, et al. A kind of ternary alloy film and a method for preparing impregnated dispenser cathode coated with film[P]. China Patent ZL200710118004, 2007.

BARIK R K, BERA A, RAJU R S, et al. Development of alloy-film coated dispenser cathode for terahertz vacuum electron devices application[J]. Applied Surface Science, 2013, 276(7): 817–822 doi: 10.1016/j.apsusc.2013.04.004

刘燕文, 王小霞, 田宏, 等. 纳米粒子薄膜热电子发射性能[J]. 中国科学: 信息科学, 2015, 45(1): 145–156

LIU Yanwen, WANG Xiaoxia, TIAN Hong, et al. Study on emission properties of the nanopatical films[J]. Scientia Sinica Informationis, 2015, 45(1): 145–156

王小霞, 张永清, 丁耀根, 等. 一种用于医疗加速器栅控电子枪阴极的研制[J]. 真空科学与技术学报, 2015, 35(4): 468–473 doi: 10.13922/j.cnki.cjovst.2015.04.15

WANG Xiaoxia, ZHANG Yongqing, DING Yaogen, et al. Novel type of grid-controlled electron gun for radiation therapy accelerator[J]. Chinese Journal of Vacuum Science and Technology, 2015, 35(4): 468–473 doi: 10.13922/j.cnki.cjovst.2015.04.15

AURELIUS S. Activation process of impregnated dispenser cathode viewed in the large-screen emission microscope[J]. Journal of Electronics&Control, 1962, 13(5): 401–416 doi: 10.1080/00207216208937447

WAN C, VAUGHN J M, SADOWSKI J T, et al. Scandium oxide coated polycrystalline tungsten studied using emission microscopy and photoelectron spectroscopy[J]. Ultramicroscopy, 2012, 119(2): 106–110 doi: 10.1016/j.ultramic.2011.10.001

KORDESCH M E, VAUGHN J M, WAN C, et al. Model scandate cathodes investigated by thermionic emission microscopy[J]. Journal of Vacuum Science&Technology B, 2010, 29(4): 41–42 doi: 10.1116/1.3589442

方厚民, 苏翘秀, 苏煦春. 铝酸盐钡钨阴极的表面研究[J]. 真空科学与技术学报, 1983(2): 91–98 doi: 10.13922/j.cnki.cjovst.1983.02.004

FANG Houmin, SU Qiaoxiu, and SU Xuchun. A surface study of impregnated tungsten dispenser cathodes[J]. Chinese Journal of Vacuum Science and Technology, 1983(2): 91–98 doi: 10.13922/j.cnki.cjovst.1983.02.004

LIU Yanwen, TIAN Hong, HAN Yong, et al. Study on the emission properties of the impregnated cathode with nanoparticle films[J]. IEEE Transactions on Electron Devices, 2012, 59(12): 3618–3624 doi: 10.1109/TED.2012.2219583

杨靖鑫, 阴生毅, 王宇, 等. 阴极蒸发物电子发射现象的研究[J]. 电子与信息学报, 2011, 33(7): 1722–1726 doi: 10.3724/SP.J.1146.2010.01219

YANG Jingxin, YIN Shengyi, WANG Yu, et al. Study on electron emission phenomenon of cathode evaporator[J]. Journal of Electronics&Information Technology, 2011, 33(7): 1722–1726 doi: 10.3724/SP.J.1146.2010.01219

任峰, 阴生毅, 卢志鹏, 等. 深紫外激光光发射与热发射电子显微镜在热扩散阴极研究中的应用[J]. 物理学报, 2017, 66(18): 225–234 doi: 10.7498/aps.66.187901

REN Feng, YIN Shengyi, LU Zhipeng, et al. Applications of deep ultraviolet laser photo-and thermal-emission electron microscope in thermal dispenser cathode research[J]. Acta Physica Sinica, 2017, 66(18): 225–234 doi: 10.7498/aps.66.187901

阴生毅, 张洪来, 杨靖鑫, 等. 覆锇膜阴极表面同步辐射光电子谱研究[J]. 电子与信息学报, 2011, 33(12): 3040–3045 doi: 10.3724/SP.J.1146.2011.00358

YIN Shengyi, ZHANG Honglai, YANG Jingxin, et al. Study on surface of impregnated cathodes coated Os film by synchronous radiation photoelectron spectrum[J]. Journal of Electronics&Information Technology, 2011, 33(12): 3040–3045 doi: 10.3724/SP.J.1146.2011.00358

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