分布式MEMS移相器桥高度与相移量的机电集成模型及应用

王从思; 殷蕾; 李飞; 应康; 张轶群; 王猛

doi:10.11999/JEIT170762

分布式MEMS移相器桥高度与相移量的机电集成模型及应用

doi: 10.11999/JEIT170762

1.
(西安电子科技大学电子装备结构设计教育部重点实验室西安 710071) ②(西安华为技术有限公司西安 710075) ③(南京电子技术研究所南京 210039) ④(陕西黄河集团有限公司西安 710043)

基金项目:

国家自然科学基金(51522507, 51475349, 51490660)，国家973计划项目(2015CB857100)，陕西省青年科技新星计划(2016KJXX-06)，中央高校基本科研业务费专项资金(JBG150409, KJXX1603, 7214479606)

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出版历程
- 收稿日期: 2017-07-24
- 修回日期: 2018-01-22
- 刊出日期: 2018-06-19

Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter

1.
(Key Laboratory of Electronic Equipment Structure Design, Ministry of Education, Xidian University, Xi&rsquo
2.
(Xi&rsquo

Funds:

The National Natural Science Foundation of China (51522507, 51475349, 51490660), The National 973 Plan of China (2015CB857100), Shaanxi Province Youth Science and Technology New Star Program (2016KJXX-06), The Special Funds for Basic Scientific Research Services in Central Colleges and Universities (JBG150409, KJXX1603, 7214479606)

摘要

摘要: 移相器是控制相控阵天线空间波束捷变的方向盘，其性能的优良决定着相控阵天线性能的高低。微机电系统(MEMS)移相器优势明显，但由于相控阵天线工作环境复杂，环境载荷会导致MEMS移相器结构变形，进而直接降低整个相控阵天线的性能。为此，该文研究MEMS移相器关键结构参数和电性能之间的耦合关系，将复杂环境要素对物理结构的影响传递到结构参数和电参数上，推导出分布式MEMS移相器的机电集成模型，并利用集成模型对变形MEMS移相器进行电性能快速评估和结构公差计算。仿真结果说明了集成模型的有效性和工程应用价值。
- 相控阵天线 /
- 分布式MEMS移相器 /
- 结构变形 /
- 机电耦合
Abstract: Phase shifter is the steering wheel to control the beam direction of Phased Array Antenna (PAA), which determines the performance of the PAA. Micro Electronic Mechanical System (MEMS) phase shifter has obvious advantages for PAA, but there always exists structural deformation caused by the complex work environment and environmental load of the PAA, which has serious impact over the performance of the PAA. Therefore, the coupling between the key structural parameters of MEMS phase shifter and the electrical parameters is studied by transmitting the influence of complex environmental factors on structure of MEMS to the structural and electrical parameters. The electromechanical integrated model of distributed MEMS phase shifter is derived. Besides, the rapid performance assessment and structural tolerance of the deformed MEMS phase shifter is calculated based on the coupled model. The simulation results show the effectiveness of the coupled model and the engineering application value.
- Phased Array Antenna (PAA) /
- Distributed MEMS phase shifter /
- Structural distortion /
- Electromechanical coupling

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