分布式MEMS移相器桥高度与相移量的机电集成模型及应用

王从思; 殷蕾; 李飞; 应康; 张轶群; 王猛

doi:10.11999/JEIT170762

分布式MEMS移相器桥高度与相移量的机电集成模型及应用

doi: 10.11999/JEIT170762

1.
(西安电子科技大学电子装备结构设计教育部重点实验室西安 710071) ②(西安华为技术有限公司西安 710075) ③(南京电子技术研究所南京 210039) ④(陕西黄河集团有限公司西安 710043)

基金项目:

国家自然科学基金(51522507, 51475349, 51490660)，国家973计划项目(2015CB857100)，陕西省青年科技新星计划(2016KJXX-06)，中央高校基本科研业务费专项资金(JBG150409, KJXX1603, 7214479606)

计量
- 文章访问数: 1137
- HTML全文浏览量: 103
- PDF下载量: 174
- 被引次数: 0
出版历程
- 收稿日期: 2017-07-24
- 修回日期: 2018-01-22
- 刊出日期: 2018-06-19

Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter

1.
(Key Laboratory of Electronic Equipment Structure Design, Ministry of Education, Xidian University, Xi&rsquo
2.
(Xi&rsquo

Funds:

The National Natural Science Foundation of China (51522507, 51475349, 51490660), The National 973 Plan of China (2015CB857100), Shaanxi Province Youth Science and Technology New Star Program (2016KJXX-06), The Special Funds for Basic Scientific Research Services in Central Colleges and Universities (JBG150409, KJXX1603, 7214479606)

摘要

摘要: 移相器是控制相控阵天线空间波束捷变的方向盘，其性能的优良决定着相控阵天线性能的高低。微机电系统(MEMS)移相器优势明显，但由于相控阵天线工作环境复杂，环境载荷会导致MEMS移相器结构变形，进而直接降低整个相控阵天线的性能。为此，该文研究MEMS移相器关键结构参数和电性能之间的耦合关系，将复杂环境要素对物理结构的影响传递到结构参数和电参数上，推导出分布式MEMS移相器的机电集成模型，并利用集成模型对变形MEMS移相器进行电性能快速评估和结构公差计算。仿真结果说明了集成模型的有效性和工程应用价值。
- 相控阵天线 /
- 分布式MEMS移相器 /
- 结构变形 /
- 机电耦合
Abstract: Phase shifter is the steering wheel to control the beam direction of Phased Array Antenna (PAA), which determines the performance of the PAA. Micro Electronic Mechanical System (MEMS) phase shifter has obvious advantages for PAA, but there always exists structural deformation caused by the complex work environment and environmental load of the PAA, which has serious impact over the performance of the PAA. Therefore, the coupling between the key structural parameters of MEMS phase shifter and the electrical parameters is studied by transmitting the influence of complex environmental factors on structure of MEMS to the structural and electrical parameters. The electromechanical integrated model of distributed MEMS phase shifter is derived. Besides, the rapid performance assessment and structural tolerance of the deformed MEMS phase shifter is calculated based on the coupled model. The simulation results show the effectiveness of the coupled model and the engineering application value.
- Phased Array Antenna (PAA) /
- Distributed MEMS phase shifter /
- Structural distortion /
- Electromechanical coupling

HTML全文

参考文献(24)

DING Wuwei, ZHAO Wenpu, and MU Shibo. Research on T / R component technology of active phased array radar[J]. Flying Missiles, 2016(12): 77-83. doi: 10.16338/j.issn.1009- 1319.2016.12.17.

丁武伟, 赵文普, 穆仕博. 有源相控阵雷达 T/R 组件技术研究[J]. 飞航导弹, 2016(12): 77-83. doi: 10.16338/j.issn.1009- 1319.2016.12.17.

CHAKRABORTY A and KAR A K. MEMS-based phase shifters for phased array applications fully integrated on PCB substrates[C]. Proceedings of the International Conference on Signal, Networks, Computing, and Systems, India, 2016: 225-231. doi: 10.1007/978-81-322-3589-7_24.

汤广富, 甘荣兵, 李华, 等. 移相放大器对主动雷达隐身装置的性能影响[J]. 系统工程与电子技术, 2015, 37(9): 2010-2017. doi: 10.3969/j.issn.1001-506X.2015.09.09.

TANG Guangfu, GAN Rongbin, LI Hua, et al. Influence of phase-shifting amplifier on performance of active radar stealth device[J]. Systems Engineering and Electronics, 2015, 37(9): 2010-2017. doi: 10.3969/j.issn.1001-506X.2015.09.09.

刘立, 胡磊, 丑修建. 发展中的 RF MEMS 开关技术[J]. 电子技术应用, 2016(11): 14-17, 21. doi: 10.16157/j.issn.0258- 7998.2016.11.002.

LIU Li, HU Lei, and NIU Xiujian. Development of RF MEMS switching technology[J]. Application of Electronic Technique, 2016(11): 14-17, 21. doi: 10.16157/j.issn.0258-7998.2016. 11.002.

WANG Congsi, DUAN Baoyan, ZHANG Fushun, et al. Coupled structural-thermal modeling and analysis of active phased array antennas[J]. IET Microwaves, Antennas Propag-ation, 2010, 4(2): 247-257. doi: 10.1049/iet-map.2008. 0274.

王从思, 康明魁, 王伟, 等. 结构变形对相控阵天线电性能的影响分析[J]. 系统工程与电子技术, 2013, 35(8): 1644-1649. doi: 10.3969/i.issn.1001-506X.2013.08.10.

WANG Congsi, KANG Mingkui, WANG Wei, et al. Analysis of the effect of structural deformation on the electrical performance of phased array antenna[J]. Systems Engineering and Electronics, 2013, 35(8): 1644-1649. doi: 10.3969/i.issn. 1001-506X.2013.08.10.

FERNANDEZ-BOLANO M, LISEC T, DAINESI P, et al. Thermally stable distributed MEMS phase shifter for airborne and space applications[C]. European Microwave Conference (EuMC) 2008. 38th European. IEEE, 2008: 100-103. doi: 10.1109/EUMC.2008.4751397.

BARKER N S and REBEIZ G M. Distributed MEMS true-time delay phase shifters and wide-band switches[J]. IEEE Transactions on Microwave Theory Techniques, 1998, 46(11): 1881-1890. doi: 10.1109/22.734503.

Tian W, Zhang X, and CHEN Z. Performance analysis of MEMS phase shifters based on RF MEMS switches: A review[J]. Recent Patents on Mechanical Engineering, 2017, 10(2): 126-139. doi: 10.2174/2212797610666170601105336.

GHOLIZADEH V, ASADI M J, NING Y, et al. Low- dispersion metamaterial-based phase shifters with reduced size and number of MEMS switches[C]. 2016 IEEE MTT-S International Wireless Symposium (IWS), Shanghai, 2016: 1-4. doi: 10.1109/IEEE-IWS.2016.7585412.

SCARDELLETTI M C, PONCHAK G E, and VARALIAY N C. Ka-Band, MEMS switched line phase shifters implemented in finite ground coplanar waveguide[C]. 32nd European IEEE Microwave Conference, Milan, 2002: 1-4. doi: 10.1109/ EUMA.2002.339405.

KO C H, HO K M J, and REBEIZ G M. An electronically- scanned 1.82.1 GHz base-station antenna using packaged high-reliability RF MEMS phase shifters[J]. IEEE Transactions on Microwave Theory and Techniques, 2013, 61(2): 979-985. doi: 10.1109/TMTT.2012.2231698.

王雄师, 张斌珍, 段俊萍, 等. 一种宽频带 RF MEMS 开关的设计研究[J]. 真空科学与技术学报, 2017, 37(3): 341-344. doi: 10.13922/j.cnki.cjovst.2017.03.18.

WANG Xiongshi, ZHANG Binzhen, DUAN Junping, et al. Design of a broadband RF MEMS switch[J]. Journal of Vacuum Science and Technology, 2017, 37(3): 341-344. doi: 10.13922/j.cnki.cjovst.2017.03.18.

CHAKRABORTY A and GUPTA B. Paradigm phase shift: RF MEMS phase shifters: An overview[J]. IEEE Microwave Magazine, 2017, 18(1): 22-41. doi: 10.1109/MMM.2016. 2616155.

BORGIOLI A, LIU Y, NAGRA A S, et al. Low-loss distributed MEMS phase shifter[J]. IEEE Microwave Guided Wave Letters, 2000, 10(1): 7-9. doi: 10.1109/75. 842070.

REBEIZ G M. Phase noise analysis of MEMS-based phase shifters[C]. Microwave Conference, 2001. London, 2001: 1-4. doi: 10.1109/EUMA.2001.339121.

李勇, 许高斌, 陈兴, 等. 基于 RF MEMS 开关的 4 位分布式移相器的设计[J]. 仪表技术与传感器, 2016(5): 29-31.

LI Yong, XU Gaobin, CHEN Xing, et al. Design of 4-bit distributed phase-shifter based on RF MEMS switch[J]. Instrumentation Technology and Sensors, 2016(5): 29-31.

REBEIZ G M. RF MEMS: Theory, Design, And Technology [M]. New York . John Wiley Sons, 2004: 52-116.

施引文献

资源附件(0)

访问统计