IC缺陷轮廓的分形插值模型
FRACTAL INTERPOLATION MODEL OF IC DEFECT OUTLINES
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摘要: 现用于集成电路(IC)成品率预报及故障分析的缺陷模型均是用圆或正方形来代替真实缺陷的复杂轮廓进行近似建模的，从而在模型中引入了很大的误差。本文利用分形插值的思想直接对真实缺陷的轮廓进行模拟，从而提出了一种新的缺陷轮廓表征模型。实验结果表明：与传统的最大圆模型、最小圆模型及椭圆模型相比，新模型的建模精度有了很大的提高。Abstract: Available defect outline model used for yield prediction and inductive fault analysis of integrated circuits (IC) all model a real defect by replacing its real rugged outlines with circular discs or squares,then great errors were aroused in these models.Based on the idea of fractal interpolation,this paper presents a new model to characterize those real defect outlines.The comparison of the new model with those models available indicates that the new model is a more accurate defect outline model.
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Ferguson F J,Shen J P.Extraction and simulation of realistic CMOS faults using inductive fault analysis,presented at the Internat.Test Conf.,Paris:1988,136-140.[2]Prabhu A V F.Modeling the critical area in yield forecasts,IEEE J[J].of Solid-State Circ.1985,20(4):874-878[3]Lukaszek W,Yarbrough W,Walker T,Meindl J.CMOS test chip design for process problem debugging and yield prediction experiments,Solid State Technol.,1986,29(3):87-93.[4]Spiegel G,Stroele A P.Optimization of deterministic test sets using an estimation of product quality,Presented at the Asian Test Symp.,Bejing,China:Nov.1993,67-72.[5]Hess C,Strole A.Modeling of real defect outlines for defect size distribution and yield prediction,Proc.IEEE Int.Conference on Microelectronics Test Structures,March 1993,45-50.[6]姜晓鸿，郝跃等．IC制造中的真实缺陷轮廓表征方法研究，电子学报，1998，26(2)：11-14．[7]林鸿溢等．分形论-奇异性探索．北京：北京理工大学出版社，1992，98-125．[8]姜晓鸿，郝跃，徐国华．IC制造中的真实缺陷轮廓的分形特征．半导体学报，19(2)：123-126．[9]姜晓鸿，郝跃，徐国华．IC缺陷轮廓的盒维数及其方向的分布特征．半导体学报，19(8)：625-630．[10][英]肯尼思．法尔可内著，曾文曲等译．分形几何数学基础及其应用．沈阳：东北大学出版社，1993，110-130．[11]姜晓鸿，郝跃，徐国华. Goodness-of-FIT tests for distributions of the ratio dmax/dmin of the real defect outlines in the IC manufacturing process.J.of Xidian University,1997, 24(增刊):35-50.[12]中山大学数学力学系编．概率论及数理统计(下册)．北京：高等教育出版社，1985，138-150． -
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