热激励硅梁谐振器研究
STUDY OF THERMALLY EXCITED SILICON BEAM RESONATOR
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摘要: 作者利用微电子机械加工技术成功研制出用于高精度压力传感器的硅梁谐振器。采用热激励方式,测定了谐振梁的开环振动幅频特性:室温真空中谐振峰-3dB带宽1.2Hz,Q值大于33000。从理论和实验两方面讨论了低热激励功率条件下激励功率与谐振频率的线性关系,二者符合较好。
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关键词:
- 热激励; 硅梁; 谐振器
Abstract: A micro-machined single crystal beam resonator for high accuracy pressure sensors by utilizing Micro-ElectroMechanical System (MEMS) technology has been successfully fabricated. By means of thermal excitation, the frequency response (including amplitude and phase) of the resonator has been characterized with an open-loop frequency sweeping method. The -3dB width of resonant peak (less than 1.2Hz) corresponds a very high quality factor Q value greater than 33000 in vacuum at room-temperature. The frequency response of the resonator at different levels of excitation has been discussed theoretically and experitrientally The result shows a good linearity of frequency versus excitation power at lower excitation power, and is coincident with the theory. -
J. C. Greenwood, D. W. Sat cheil, A miniature silicon resonant pressure sensor lEE Proc-l.l988, 135(5), 369-372.[2]J. Greenwood, T. Wray, High accuracy pressure measurement with a silicon resonant sensor.Sensors and Actuators, 1993, A37-38, 82 85.[3]K. Ikeda, H. Kuwayama, T. Kobayashi, T. Watanabe, T. Nishikawa, T. Toshida. K. Harada.Silicon pressure sensor int egrat, es resonant st rain gauge on diaphragm, Sensors and Actnators .1990, A21-23, 146-150.[4]T.S.J. Lanmerink, M. Elwenspoek, J. H. J. Fhitman, Performance of thermally excited reso-nantors, Sensors and Actuat ors, 1990, A21-23, 352-356.[5]徐芝纶编著,弹性力学(下),北京,高等教育出版社,1998,第13章,55-63. -
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