大面积锗光电接收器的特性测量
CHARACTERISTICS OF LARGE AREA GERMANIUM PHOTODIODE
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摘要: 本文介绍了大面积锗光电接收器的光谱响应、量子效率、频率特性和I-V特性的测量方法。在波长为1.3m处,响应度为0.47 A/W,量子效率为45%,频率响应为100kHz。在反向偏压为 5V,温度为12℃时,反向漏电流(以电流密度表示)为 2310-6A/cm2(直径为 7.5mm)。在1060℃变温范围内,测定了接收器的I-V温度特性和暗电流与温度的关系。最后对测试系统和实验现象进行了初步讨论。
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关键词:
Abstract: A fabrication procedure for large area germanium photodiodes has been demonstrated and the measuring methods on characteristics of spectral response, quantum efficiency, fre-quency response and I-V for this device have been described. At 1.3 m wavelength, the responsibility and the quantum efficiency are 0.47 A/W and 45%, respectively. The frequ-ency response of large area germanium photodiodes is about 100kHz. When bias voltage VB is in the range of 5V at room temperature (12℃), the dark current density of the fabricated diodes is 2310-6 A/cm2(=7.5mm). Typical dark current and I-V dependences on temperature were studied for the large area germanium photodiodes in the range of 2026℃. We have also analysed and discussed these experimental results. -
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