微机械陀螺振动特性的等效电学模拟
Equivalent electrical simulation of micromachined gyroscope\s oscillating properties
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摘要: 根据微机械陀螺的动力学方程建立其振动特性的等效电路模型,该模型用电路模拟工具PSPICE实现。利用这个电路模型,可以分析陀螺的振动特性,包括检测振动的瞬态响应和稳态响应,检测振动对输入角速度的频率响应特性,从而可以获得陀螺工作的优化条件;并为传感器与接口电路的整体模拟打下基础。
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关键词:
- 微机械陀螺; 等效电路模型; 模拟
Abstract: An equivalent circuit model of micromachined gyroscope s oscillating properties is derived according to its dynamics equation. The model is implemented with the circuit simulation tool PSPICE, and can be used to analyse oscillating properties, including the detection mode transient response, stable response and frequency response to angular rate. Thus the optimizing conditions can be gotten. And also the model enables the sensor to simulate together with the interfacing electronics. -
B.L. Lee, S. S. Baek, H. S. Kim, et al., A tunable vibratory microgyroscope, Sensors and Actuators A, 1998, 64(1), 51-56.[2]T. Veijola, Accelerometer model in APLAC, Tech. Rep. CT-18, Helsinki University of Technology,Circuit Theory Laboratory, Feb. 1994.[3]T. Veijola, H. Kuisma, J. Lahdenpera, et al., Equivalent circuit model of the squeezed gas film in a silicon accelerometer, Sensors and Actuators A, 1995, 48(3), 239-248.[4]熊幸果,微机械梳状电容式加速度传感器及梳状振动式陀螺研究,[博士论文],上海,中国科学院上海冶金研究所,1999[5]黄小振,电容式振动微机械陀螺接口电路的设计、模拟与测试,[硕士论文],上海,中国科学院上海冶金研究所,2001. -
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