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Volume 11 Issue 1
Jan.  1989
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Article Navigation >  Journal of Electronics & Information Technology  > 1989  >  11(1): 107-112
Tao Zhaomin, Xia Changhong, Pan Xiaodan, Pan Xia. REMOVING OF THE CARBON CONTAMINATION FROM GaAs, GaP, InP, GaInAs AND GaInPAs SURFACES[J]. Journal of Electronics & Information Technology, 1989, 11(1): 107-112.
Citation: Tao Zhaomin, Xia Changhong, Pan Xiaodan, Pan Xia. REMOVING OF THE CARBON CONTAMINATION FROM GaAs, GaP, InP, GaInAs AND GaInPAs SURFACES[J]. Journal of Electronics & Information Technology, 1989, 11(1): 107-112.
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REMOVING OF THE CARBON CONTAMINATION FROM GaAs, GaP, InP, GaInAs AND GaInPAs SURFACES

  • Received Date: 1987-09-02
  • Rev Recd Date: 1988-03-26
  • Publish Date: 1989-01-19
    Abstract
  • The different results of removing the carbon contamination with UV/O3from the GaAs, GaP, InP, GaInAs and GaInPAs surfaces are given.
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    • References(1)
  • J. J. Uebbing, J.Appl. Phys., 2(1970), 41.[2]谈凯声等,电子科学学刊,8(1986),155-157.
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