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Volume 19 Issue 3
May  1997
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Mei Qichu, P. J. M. Peters, W. J. Witteman. HIGH-EFFICIENCY OPERATION OF A DISCHARGE-EXCITED XeF(BX) EXCIMER LASER[J]. Journal of Electronics & Information Technology, 1997, 19(3): 387-392.
Citation: Mei Qichu, P. J. M. Peters, W. J. Witteman. HIGH-EFFICIENCY OPERATION OF A DISCHARGE-EXCITED XeF(BX) EXCIMER LASER[J]. Journal of Electronics & Information Technology, 1997, 19(3): 387-392.

HIGH-EFFICIENCY OPERATION OF A DISCHARGE-EXCITED XeF(BX) EXCIMER LASER

  • Received Date: 1996-03-01
  • Rev Recd Date: 1996-08-12
  • Publish Date: 1997-05-19
  • In an X-ray preionized XeF(BX) discharge-excited laser driven by a prepulse-main pulse circuit with magnetic isolation and a pulse compressor the dependances of the laser output and conversion efficiency on gas composition, total gas pressure, circuit parameters and delay time were experimentally investigated. A considerable improvement in the laser performance was achieved. An output energy of 345 mJ with an overall efficiency of 3% was obtained from an active volume of 0.11L at a total gas pressure of 2.5105 Pa in a NF3/Xe/Ne mixture.
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  • Litzenberger L, Mandl A. Increased XeF(BX) laser efficiency at high pump rate and elevated temperature[J].Appl. Phys. Lett.1988, 52(19):1557-1559[2]Fisher C H, et al. High efficiency XeCl laser with spiker and magnetic isolation[J].Appl. Phys. Lett.1986, 48(23):1574-1576[3]Smilanski I, Buron S R, Burkes T R. Electrical excitation of an XeCl laser using magnetic pulse compression[J].Appl. Phys. Lett.1982, 40(7):547-548[4]Gerritsen J W, et al. High efficiency operation of a gas discharge XeCl laser using a magnetically induced resonant voltage overshoot circuit[J].J. Appl. Phys.1990, 67(7):3517-3519
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