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Volume 13 Issue 6
Nov.  1991
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Guo Kangjin Du Gendi Wu Zheng. STUDY OF THE ANODIZATION OF Al FILM ON InP SUBSTRATE AND ITS PROPERTIES[J]. Journal of Electronics & Information Technology, 1991, 13(6): 611-617.
Citation: Guo Kangjin Du Gendi Wu Zheng. STUDY OF THE ANODIZATION OF Al FILM ON InP SUBSTRATE AND ITS PROPERTIES[J]. Journal of Electronics & Information Technology, 1991, 13(6): 611-617.

STUDY OF THE ANODIZATION OF Al FILM ON InP SUBSTRATE AND ITS PROPERTIES

  • Received Date: 1990-07-03
  • Rev Recd Date: 1991-04-28
  • Publish Date: 1991-11-19
  • The anodization of Al film on InP substrate and the properties of anodic Al2O3/lnP have been investigated by AES, DLTS, I-V, C-V and ellipsometer. The results show that the anodic oxide Al2O3 has the permitivity of 11-12 and the resistivity of 1.31013 ohm-cm. Interface state density at Al2O3/InP is about 1011cm-2eV-1. DLTS reveals that there is continuously-distributed interface electron traps at Al2O3/lnP interface. Anodic oxide Al2O3 exhibits good stability and electrical properties and could be used for passivation, diffusion mask and gate insulator etc.
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  • N. Susa et al., J. Electrocitem. Soc. 130(1983)11, 2220.[2]A. Yamamoto et al., J. Electrochem Soc, 129(1982)12, 2795.[3]H. H. Wiedet, J. Vac. Sci. Technol., 15(1978)4, 1498.[4]A. A. Studna et al.,Appl. Phys. Lett., 39(1981)12, 965.[5]D. H. Laughlin et al., Appl.Phys. Lett., 37(1980)10, 915.[6]Y. Hirayama et al., J. of Electronic Materials, 11(1982)6, 1011.[7]C: W. Wilmsen, Thin Solid Films, 39(1976)3, 105.[8]C. W. Wilmsen et al., J. Vac. Sci. Technol., 15(1978)4, 1513.[9]P. N. Favernec et al., Appl. Phys. Lett, 34(1978)9, 807.[10]K. Kamimura et al., Thin Solid Films, 56(1979)5, 215.[11]W. E. Spicer et al.,J. Vac. Sci. Teehnol, 17(198.0)5, 1019.[12]Y. Ohmachi et al., Japan J. Appl, Phys, 19(1980)7, 1425.[13]D. Fritzsche, Eleelron, Lets., 14(1978)3, 51.[14]K. Kanazawa et al., Japan J. Appl. Phys, 20(1981)3, L211.
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