Qin Ming, Huang Qingan, Wei Tongli. FABRICATION AND CHARACTERISTICS OF FIELD EMISSION ARRAYS[J]. Journal of Electronics & Information Technology, 1998, 20(2): 281-284.
Citation:
Qin Ming, Huang Qingan, Wei Tongli. FABRICATION AND CHARACTERISTICS OF FIELD EMISSION ARRAYS[J]. Journal of Electronics & Information Technology, 1998, 20(2): 281-284.
Qin Ming, Huang Qingan, Wei Tongli. FABRICATION AND CHARACTERISTICS OF FIELD EMISSION ARRAYS[J]. Journal of Electronics & Information Technology, 1998, 20(2): 281-284.
Citation:
Qin Ming, Huang Qingan, Wei Tongli. FABRICATION AND CHARACTERISTICS OF FIELD EMISSION ARRAYS[J]. Journal of Electronics & Information Technology, 1998, 20(2): 281-284.
Field emission arrays are important to vacuum microelectronic microwave devices. The downward pyramid filled cone and upward etched silicon cone are fabricated. Two kinds of packing structures are used and the emission properties of these cones are tested. The characteristics of these structures and the application for microwave devices are analyzed.
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