MULTIPOLE ELECTROSTATIC DEFLECTORS FOR OBTAINING UNIFORM DEFLECTION FIELD

Jiang Xinrong; Na Zhaofeng

Volume 9 Issue 2

Mar. 1987

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Article Navigation > Journal of Electronics & Information Technology > 1987 > 9(2): 140-148

Jiang Xinrong, Na Zhaofeng. MULTIPOLE ELECTROSTATIC DEFLECTORS FOR OBTAINING UNIFORM DEFLECTION FIELD[J]. Journal of Electronics & Information Technology, 1987, 9(2): 140-148.

Citation:

Jiang Xinrong, Na Zhaofeng. MULTIPOLE ELECTROSTATIC DEFLECTORS FOR OBTAINING UNIFORM DEFLECTION FIELD[J]. Journal of Electronics & Information Technology, 1987, 9(2): 140-148.

Jiang Xinrong, Na Zhaofeng. MULTIPOLE ELECTROSTATIC DEFLECTORS FOR OBTAINING UNIFORM DEFLECTION FIELD[J]. Journal of Electronics & Information Technology, 1987, 9(2): 140-148.

Citation:

Jiang Xinrong, Na Zhaofeng. MULTIPOLE ELECTROSTATIC DEFLECTORS FOR OBTAINING UNIFORM DEFLECTION FIELD[J]. Journal of Electronics & Information Technology, 1987, 9(2): 140-148.

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MULTIPOLE ELECTROSTATIC DEFLECTORS FOR OBTAINING UNIFORM DEFLECTION FIELD

Received Date: 1985-06-05
Rev Recd Date: 1985-10-16
Publish Date: 1987-03-19

Abstract

Abstract

The general field solutions are obtained for two kinds of infinitely long multipole electrostatic deflectors. A method is Riven to obtain uniform deflection field near optical axis. Having calculated six forms of the deflectors, the concerned formulas and data are given. The relationship and difference between ihe two kinds of deflectors are analysed.

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References

E. Goto, et al., J. Vac. Sci. Technol., B1(1983), 1289.[2]T. Hosokawa, et al., ibid., B1(1983), 1293.[3]M. Idesawa, et al., ibid., B1(1983), 1322.[4]J. C. Eidson, et al., ibid., 19(1981), 932.[5]S. Moriya, et al., ibid., B1(1983), 990.[6]G. Owen, et al., ibid., 19(1981), 1064.[7]R. G. E. Hutter, In advances in Image Pickup and Display, Vol. 1, p. 202, Edited by B. Kazan, 1974.

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