REQUIREMENT OF SILICON FLATNESS FOR SILICON DIRECT BONDING TECHNOLOGY

Fu Xinghua; Huang Qingan; Chen Junning; Tong Qinyi

Volume 16 Issue 3

May 1994

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Article Navigation > Journal of Electronics & Information Technology > 1994 > 16(3): 290-295

Fu Xinghua, Huang Qingan, Chen Junning, Tong Qinyi. REQUIREMENT OF SILICON FLATNESS FOR SILICON DIRECT BONDING TECHNOLOGY[J]. Journal of Electronics & Information Technology, 1994, 16(3): 290-295.

Citation:

Fu Xinghua, Huang Qingan, Chen Junning, Tong Qinyi. REQUIREMENT OF SILICON FLATNESS FOR SILICON DIRECT BONDING TECHNOLOGY[J]. Journal of Electronics & Information Technology, 1994, 16(3): 290-295.

Fu Xinghua, Huang Qingan, Chen Junning, Tong Qinyi. REQUIREMENT OF SILICON FLATNESS FOR SILICON DIRECT BONDING TECHNOLOGY[J]. Journal of Electronics & Information Technology, 1994, 16(3): 290-295.

Citation:

Fu Xinghua, Huang Qingan, Chen Junning, Tong Qinyi. REQUIREMENT OF SILICON FLATNESS FOR SILICON DIRECT BONDING TECHNOLOGY[J]. Journal of Electronics & Information Technology, 1994, 16(3): 290-295.

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REQUIREMENT OF SILICON FLATNESS FOR SILICON DIRECT BONDING TECHNOLOGY

Received Date: 1992-12-28
Rev Recd Date: 1993-04-12
Publish Date: 1994-05-19

Abstract

Abstract

The influence of silicon slice flatness on bonding technology and the relation between foreign particle and resulting bubble are quantitatively presented by the elastic theory. It is demonstrated experimentally by X ray double crystal dif-fractometry and infrared transmission imager.

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References(1)

References

Lasky J B. Appl. Phys. Lett., 1986, 48(1): 78-80.[2]Nakagawa N, et al. 1800V bipolar-mode MOSFETs: a first application of SDB technique to a[3]power device. Proc. IEDM. CA, USA: 1986, 122-125.[4]Barth P W.Sensors and Actuators, 1990, A23(1): 919-926.[5]Lu S J. Sensors and Actuators, 1990, A23(1): 916-963.[6]Maszara W P. J. Electrochem. Soc., 1991, 138(1): 341-347.[7]Tong Q Y, et al. IEEE Electron Device Lett., 1991, 12(3): 101-103.[8]Maszara W P, et al. J. Appl. Phys., 1988, 64(10): 4943-4950.[9]Tong Q Y, et al. Electron Lett., 1991, 27(3): 288-289.[10]吴家龙.弹性力学.上海:同济大学出版社,1987,317-325.[11]徐芝伦.弹性力学教程.北京:高等教育出版社,1980,288-294.[12]黄庆安,等.电子科学学刊,1992,14(6): 574-578.

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