Equivalent electrical simulation of micromachined gyroscope\s oscillating properties

Che Lufeng; Xiong Bin; Huang Xiaozhen; Wang Yuelin

Volume 25 Issue 2

Feb. 2003

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Article Navigation > Journal of Electronics & Information Technology > 2003 > 25(2): 279-283

Che Lufeng, Xiong Bin, Huang Xiaozhen, Wang Yuelin. Equivalent electrical simulation of micromachined gyroscope\s oscillating properties[J]. Journal of Electronics & Information Technology, 2003, 25(2): 279-283.

Citation:

Che Lufeng, Xiong Bin, Huang Xiaozhen, Wang Yuelin. Equivalent electrical simulation of micromachined gyroscope\s oscillating properties[J]. Journal of Electronics & Information Technology, 2003, 25(2): 279-283.

Citation:

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Equivalent electrical simulation of micromachined gyroscope\s oscillating properties

Received Date: 2001-07-29
Rev Recd Date: 2002-06-13
Publish Date: 2003-02-19

Abstract

Abstract

An equivalent circuit model of micromachined gyroscope s oscillating properties is derived according to its dynamics equation. The model is implemented with the circuit simulation tool PSPICE, and can be used to analyse oscillating properties, including the detection mode transient response, stable response and frequency response to angular rate. Thus the optimizing conditions can be gotten. And also the model enables the sensor to simulate together with the interfacing electronics.

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References(1)

References

B.L. Lee, S. S. Baek, H. S. Kim, et al., A tunable vibratory microgyroscope, Sensors and Actuators A, 1998, 64(1), 51-56.[2]T. Veijola, Accelerometer model in APLAC, Tech. Rep. CT-18, Helsinki University of Technology,Circuit Theory Laboratory, Feb. 1994.[3]T. Veijola, H. Kuisma, J. Lahdenpera, et al., Equivalent circuit model of the squeezed gas film in a silicon accelerometer, Sensors and Actuators A, 1995, 48(3), 239-248.[4]熊幸果,微机械梳状电容式加速度传感器及梳状振动式陀螺研究,[博士论文],上海,中国科学院上海冶金研究所,1999[5]黄小振,电容式振动微机械陀螺接口电路的设计、模拟与测试,[硕士论文],上海,中国科学院上海冶金研究所,2001.

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