CALCULATION OF ROTATIONAL ELECTROSTATIC DEFLECTION FIELDS BY USING ONE-DIMENSIONAL METHOD

Jiang Xinrong

Volume 13 Issue 1

Jan. 1991

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Article Navigation > Journal of Electronics & Information Technology > 1991 > 13(1): 108-112

Jiang Xinrong. CALCULATION OF ROTATIONAL ELECTROSTATIC DEFLECTION FIELDS BY USING ONE-DIMENSIONAL METHOD[J]. Journal of Electronics & Information Technology, 1991, 13(1): 108-112.

Citation:

Jiang Xinrong. CALCULATION OF ROTATIONAL ELECTROSTATIC DEFLECTION FIELDS BY USING ONE-DIMENSIONAL METHOD[J]. Journal of Electronics & Information Technology, 1991, 13(1): 108-112.

Jiang Xinrong. CALCULATION OF ROTATIONAL ELECTROSTATIC DEFLECTION FIELDS BY USING ONE-DIMENSIONAL METHOD[J]. Journal of Electronics & Information Technology, 1991, 13(1): 108-112.

Citation:

Jiang Xinrong. CALCULATION OF ROTATIONAL ELECTROSTATIC DEFLECTION FIELDS BY USING ONE-DIMENSIONAL METHOD[J]. Journal of Electronics & Information Technology, 1991, 13(1): 108-112.

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CALCULATION OF ROTATIONAL ELECTROSTATIC DEFLECTION FIELDS BY USING ONE-DIMENSIONAL METHOD

Jiang Xinrong

Received Date: 1989-04-03
Rev Recd Date: 1989-09-10
Publish Date: 1991-01-19

Abstract

Abstract

Calculation of some rotational electostatic defflection fields by the use of one dimensional method is put forward, and the difficulty in singular point has been overcome. The calculation example shows that the method is simple and practical.

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References(1)

References

蒋欣荣,微细加工技术,1987年,第3-4期,第14页;或Jiang Xinrong, J. Vac. Sci.Tcchnol., B6 (1988),422.[2]蒋欣荣,那兆凤,微细加工技术,1986年,第2期,第6页;或Jiang Xinrong, Na Zhaofeng, J. Vac. Sci. Tcchnol., B5(1987), 156.[3][3J E.Munro et al., Optik, 60(1982),1.[4]蒋欣荣,那兆凤,电子学报,1987年,第6期,第98页.

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