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Volume 14 Issue 6
Nov.  1992
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Huang Qinan, Tong Qinyi. A SIMPLE APPROACH TO THE CALCULATION OF THE MECHANICAL STRESS IN SILICON DEVICES[J]. Journal of Electronics & Information Technology, 1992, 14(6): 574-578.
Citation: Huang Qinan, Tong Qinyi. A SIMPLE APPROACH TO THE CALCULATION OF THE MECHANICAL STRESS IN SILICON DEVICES[J]. Journal of Electronics & Information Technology, 1992, 14(6): 574-578.

A SIMPLE APPROACH TO THE CALCULATION OF THE MECHANICAL STRESS IN SILICON DEVICES

  • Received Date: 1991-10-23
  • Rev Recd Date: 1992-03-03
  • Publish Date: 1992-11-19
  • The residual mechanical stress in SiO2 films results in the degradation of mobilities in MOSFETs. Based on the edge force approximation in SiO2 films, the stress field in MOS device is obtained. The results here are in agreement with those measured by the Raman spectrum method.
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  • 童勤义, 超大规模集成物理学导论,电子工业出版社,北京,1988年.[2]A. Bohg et al., Appl. Phys. Lett., 33(1978)6, 895-897.[3]Y. Tamaki et al., J. Electrochem.Soc., 130(1983) 10, 2266-2270.[4]H. Mikoshiba, Solid State Electron., 24(1981)3, 221-225.[5]J. Mitsuhashi, Mechanical stress and hydrogen effects on hot carrier injection, Proc. IEDM, USA, (1986), pp. 386-389.[6]D. J. Chin et al., IEEE Trans. on ED, ED-30(1983)7, 744-749.[7]H. Matsumoto et al., IEEE Trans. on ED, ED-32(1985)2, 132-140.[8]D. B. Kao et al., IEEE Trans. on ED, ED-35(1988)1, 25-37.[9]K. Kobayashi .et al., J. Electrochem. Soc., 137(1990)6, 1987-1989.[10]钱伟长, 叶开源,弹性力学,科学出版社,北京,1956年,第五章.[11]R. Zeyfang, Solid .State Eelctron., 14(1979)9, 1035-1039.[12]I. A. Blech et al., ASME J. Appl. Mech., 48(1981)6, 442-445.[13]H. Booyens et al., J. Appl. Phys., 54(1983)10, 5779-5784.[14]E. P. EerNisse, Appl. Phys. Lett., 35(1979)8, 8-10.[15]E. Anastassaki et al., Solid State Communication, 8(1970)2, 133-135.[16]黄庆安, 童勤义,MOSFET的机械应力模型,第七届全国半导体集成技术与硅材料学术年会,成都,1991年, 第97-98页.
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