A Daptive-distance Noncontact Electrostatic Meter Based on MEMS Technology

Xiaolong WEN; Pengfei YANG; Zhaozhi CHU; Chunrong PENG; Yutao LIU; Shuang WU

doi:10.11999/JEIT200571

Volume 43 Issue 10

Oct. 2021

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Article Navigation > Journal of Electronics & Information Technology > 2021 > 43(10): 3068-3074

Xiaolong WEN, Pengfei YANG, Zhaozhi CHU, Chunrong PENG, Yutao LIU, Shuang WU. A Daptive-distance Noncontact Electrostatic Meter Based on MEMS Technology[J]. Journal of Electronics & Information Technology, 2021, 43(10): 3068-3074. doi: 10.11999/JEIT200571

Citation:

Xiaolong WEN, Pengfei YANG, Zhaozhi CHU, Chunrong PENG, Yutao LIU, Shuang WU. A Daptive-distance Noncontact Electrostatic Meter Based on MEMS Technology[J]. Journal of Electronics & Information Technology, 2021, 43(10): 3068-3074. doi: 10.11999/JEIT200571

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A Daptive-distance Noncontact Electrostatic Meter Based on MEMS Technology

doi: 10.11999/JEIT200571

1.
Department of Physics, University of Science and Technology Beijing, Beijing Engineering Research Center of Detection and Appli-cation for Weak Magnetic Field, Beijing 100083, China
2.
School of Applied Science, Beijing Information Science and Technology University, Beijing 100192, China
3.
Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
4.
Aerospace Information Research Institute, Chinese Academy of Sciences, State Key Laboratory of Transducer Technology, Beijing 100190, China
5.
Beijing TFlying Transducer Technology Co. Ltd., Beijing 100083, China

Funds: The National Key R&D Program of China (2018YFF01010800), The National Natural Science Foundation of China(62031025), The Fundamental Research Funds for the Central Universities (FRF-TP-19-045A2, FRF-BD-19-017A, FRF-BD-20-12A)

Received Date: 2020-07-13
Rev Recd Date: 2020-12-08

Available Online: 2020-12-30

Publish Date: 2021-10-18

Abstract

Abstract

Electrostatic field measurement is the most direct method to detect whether an object carries excessive static charge. Traditional electrostatic meters mainly rely on fixed distance measurement. While the measured object is difficult to maintain still or not easy to approach, the distance change causes a sensitivity change and results in a measurement error. Based on the micro-machined electric field sensor, this paper proposes an electrostatic measurement idea that the meter adjusts the sensitivity adaptively according to the tested distance: measure the distance of the object through the ultrasonic module, to find the corresponding sensitivity coefficient through the microprocessor, and then to calculate the measured voltage accompany the electric field result. For the developed meter, this paper proposes a calibration method based on a combination of laboratory calibration and site calibration, builds a dynamic sensitivity calibration system, and calculates the corresponding relation of sensor sensitivity coefficients of different test distances and different measured object sizes. Compared with the conventional measurements in a fixed distance, this paper achieves more accurate non-contact surface static voltage measurement by means of sensitivity dynamic calibration. In the meanwhile, the micro electric field sensing element has the advantages of small size, low power consumption, easy integration, and capable of mass manufacturing. According to the third-party test, the average error at different test distances is –2.98%.
- Electrostatics,
- Micro-Electro-Mechanical Systems (MEMS),
- Electric field sensor,
- Static voltage,
- Dynamic calibration

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References(17)

References

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