Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter

WANG Congsi; YIN Lei; LI Fei; YING Kang; ZHANG Yiqun; WANG Meng

doi:10.11999/JEIT170762

Volume 40 Issue 6

May 2018

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Article Navigation > Journal of Electronics & Information Technology > 2018 > 40(6): 1484-1491

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Citation:

WANG Congsi, YIN Lei, LI Fei, YING Kang, ZHANG Yiqun, WANG Meng. Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter[J]. Journal of Electronics & Information Technology, 2018, 40(6): 1484-1491. doi: 10.11999/JEIT170762

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Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter

doi: 10.11999/JEIT170762

1.
(Key Laboratory of Electronic Equipment Structure Design, Ministry of Education, Xidian University, Xi&rsquo
2.
(Xi&rsquo

Funds:

The National Natural Science Foundation of China (51522507, 51475349, 51490660), The National 973 Plan of China (2015CB857100), Shaanxi Province Youth Science and Technology New Star Program (2016KJXX-06), The Special Funds for Basic Scientific Research Services in Central Colleges and Universities (JBG150409, KJXX1603, 7214479606)

Received Date: 2017-07-24
Rev Recd Date: 2018-01-22
Publish Date: 2018-06-19

Abstract

Abstract

Phase shifter is the steering wheel to control the beam direction of Phased Array Antenna (PAA), which determines the performance of the PAA. Micro Electronic Mechanical System (MEMS) phase shifter has obvious advantages for PAA, but there always exists structural deformation caused by the complex work environment and environmental load of the PAA, which has serious impact over the performance of the PAA. Therefore, the coupling between the key structural parameters of MEMS phase shifter and the electrical parameters is studied by transmitting the influence of complex environmental factors on structure of MEMS to the structural and electrical parameters. The electromechanical integrated model of distributed MEMS phase shifter is derived. Besides, the rapid performance assessment and structural tolerance of the deformed MEMS phase shifter is calculated based on the coupled model. The simulation results show the effectiveness of the coupled model and the engineering application value.
- Phased Array Antenna (PAA),
- Distributed MEMS phase shifter,
- Structural distortion,
- Electromechanical coupling

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References(24)

References

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