Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter

WANG Congsi; YIN Lei; LI Fei; YING Kang; ZHANG Yiqun; WANG Meng

doi:10.11999/JEIT170762

Volume 40 Issue 6

May 2018

Turn off MathJax

Article Contents

Article Navigation > Journal of Electronics & Information Technology > 2018 > 40(6): 1484-1491

WANG Congsi, YIN Lei, LI Fei, YING Kang, ZHANG Yiqun, WANG Meng. Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter[J]. Journal of Electronics & Information Technology, 2018, 40(6): 1484-1491. doi: 10.11999/JEIT170762

Citation:

WANG Congsi, YIN Lei, LI Fei, YING Kang, ZHANG Yiqun, WANG Meng. Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter[J]. Journal of Electronics & Information Technology, 2018, 40(6): 1484-1491. doi: 10.11999/JEIT170762

Citation:

WANG Congsi, YIN Lei, LI Fei, YING Kang, ZHANG Yiqun, WANG Meng. Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter[J]. Journal of Electronics & Information Technology, 2018, 40(6): 1484-1491. doi: 10.11999/JEIT170762

PDF( 1672 KB)

Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter

doi: 10.11999/JEIT170762

1.
(Key Laboratory of Electronic Equipment Structure Design, Ministry of Education, Xidian University, Xi&rsquo
2.
(Xi&rsquo

Funds:

The National Natural Science Foundation of China (51522507, 51475349, 51490660), The National 973 Plan of China (2015CB857100), Shaanxi Province Youth Science and Technology New Star Program (2016KJXX-06), The Special Funds for Basic Scientific Research Services in Central Colleges and Universities (JBG150409, KJXX1603, 7214479606)

Received Date: 2017-07-24
Rev Recd Date: 2018-01-22
Publish Date: 2018-06-19

Abstract

Abstract

Phase shifter is the steering wheel to control the beam direction of Phased Array Antenna (PAA), which determines the performance of the PAA. Micro Electronic Mechanical System (MEMS) phase shifter has obvious advantages for PAA, but there always exists structural deformation caused by the complex work environment and environmental load of the PAA, which has serious impact over the performance of the PAA. Therefore, the coupling between the key structural parameters of MEMS phase shifter and the electrical parameters is studied by transmitting the influence of complex environmental factors on structure of MEMS to the structural and electrical parameters. The electromechanical integrated model of distributed MEMS phase shifter is derived. Besides, the rapid performance assessment and structural tolerance of the deformed MEMS phase shifter is calculated based on the coupled model. The simulation results show the effectiveness of the coupled model and the engineering application value.
- Phased Array Antenna (PAA),
- Distributed MEMS phase shifter,
- Structural distortion,
- Electromechanical coupling

FullText(HTML)

References(24)

References

DING Wuwei, ZHAO Wenpu, and MU Shibo. Research on T / R component technology of active phased array radar[J]. Flying Missiles, 2016(12): 77-83. doi: 10.16338/j.issn.1009- 1319.2016.12.17.

丁武伟, 赵文普, 穆仕博. 有源相控阵雷达 T/R 组件技术研究[J]. 飞航导弹, 2016(12): 77-83. doi: 10.16338/j.issn.1009- 1319.2016.12.17.

CHAKRABORTY A and KAR A K. MEMS-based phase shifters for phased array applications fully integrated on PCB substrates[C]. Proceedings of the International Conference on Signal, Networks, Computing, and Systems, India, 2016: 225-231. doi: 10.1007/978-81-322-3589-7_24.

汤广富, 甘荣兵, 李华, 等. 移相放大器对主动雷达隐身装置的性能影响[J]. 系统工程与电子技术, 2015, 37(9): 2010-2017. doi: 10.3969/j.issn.1001-506X.2015.09.09.

TANG Guangfu, GAN Rongbin, LI Hua, et al. Influence of phase-shifting amplifier on performance of active radar stealth device[J]. Systems Engineering and Electronics, 2015, 37(9): 2010-2017. doi: 10.3969/j.issn.1001-506X.2015.09.09.

刘立, 胡磊, 丑修建. 发展中的 RF MEMS 开关技术[J]. 电子技术应用, 2016(11): 14-17, 21. doi: 10.16157/j.issn.0258- 7998.2016.11.002.

LIU Li, HU Lei, and NIU Xiujian. Development of RF MEMS switching technology[J]. Application of Electronic Technique, 2016(11): 14-17, 21. doi: 10.16157/j.issn.0258-7998.2016. 11.002.

WANG Congsi, DUAN Baoyan, ZHANG Fushun, et al. Coupled structural-thermal modeling and analysis of active phased array antennas[J]. IET Microwaves, Antennas Propag-ation, 2010, 4(2): 247-257. doi: 10.1049/iet-map.2008. 0274.

王从思, 康明魁, 王伟, 等. 结构变形对相控阵天线电性能的影响分析[J]. 系统工程与电子技术, 2013, 35(8): 1644-1649. doi: 10.3969/i.issn.1001-506X.2013.08.10.

WANG Congsi, KANG Mingkui, WANG Wei, et al. Analysis of the effect of structural deformation on the electrical performance of phased array antenna[J]. Systems Engineering and Electronics, 2013, 35(8): 1644-1649. doi: 10.3969/i.issn. 1001-506X.2013.08.10.

FERNANDEZ-BOLANO M, LISEC T, DAINESI P, et al. Thermally stable distributed MEMS phase shifter for airborne and space applications[C]. European Microwave Conference (EuMC) 2008. 38th European. IEEE, 2008: 100-103. doi: 10.1109/EUMC.2008.4751397.

BARKER N S and REBEIZ G M. Distributed MEMS true-time delay phase shifters and wide-band switches[J]. IEEE Transactions on Microwave Theory Techniques, 1998, 46(11): 1881-1890. doi: 10.1109/22.734503.

Tian W, Zhang X, and CHEN Z. Performance analysis of MEMS phase shifters based on RF MEMS switches: A review[J]. Recent Patents on Mechanical Engineering, 2017, 10(2): 126-139. doi: 10.2174/2212797610666170601105336.

GHOLIZADEH V, ASADI M J, NING Y, et al. Low- dispersion metamaterial-based phase shifters with reduced size and number of MEMS switches[C]. 2016 IEEE MTT-S International Wireless Symposium (IWS), Shanghai, 2016: 1-4. doi: 10.1109/IEEE-IWS.2016.7585412.

SCARDELLETTI M C, PONCHAK G E, and VARALIAY N C. Ka-Band, MEMS switched line phase shifters implemented in finite ground coplanar waveguide[C]. 32nd European IEEE Microwave Conference, Milan, 2002: 1-4. doi: 10.1109/ EUMA.2002.339405.

KO C H, HO K M J, and REBEIZ G M. An electronically- scanned 1.82.1 GHz base-station antenna using packaged high-reliability RF MEMS phase shifters[J]. IEEE Transactions on Microwave Theory and Techniques, 2013, 61(2): 979-985. doi: 10.1109/TMTT.2012.2231698.

王雄师, 张斌珍, 段俊萍, 等. 一种宽频带 RF MEMS 开关的设计研究[J]. 真空科学与技术学报, 2017, 37(3): 341-344. doi: 10.13922/j.cnki.cjovst.2017.03.18.

WANG Xiongshi, ZHANG Binzhen, DUAN Junping, et al. Design of a broadband RF MEMS switch[J]. Journal of Vacuum Science and Technology, 2017, 37(3): 341-344. doi: 10.13922/j.cnki.cjovst.2017.03.18.

CHAKRABORTY A and GUPTA B. Paradigm phase shift: RF MEMS phase shifters: An overview[J]. IEEE Microwave Magazine, 2017, 18(1): 22-41. doi: 10.1109/MMM.2016. 2616155.

BORGIOLI A, LIU Y, NAGRA A S, et al. Low-loss distributed MEMS phase shifter[J]. IEEE Microwave Guided Wave Letters, 2000, 10(1): 7-9. doi: 10.1109/75. 842070.

REBEIZ G M. Phase noise analysis of MEMS-based phase shifters[C]. Microwave Conference, 2001. London, 2001: 1-4. doi: 10.1109/EUMA.2001.339121.

李勇, 许高斌, 陈兴, 等. 基于 RF MEMS 开关的 4 位分布式移相器的设计[J]. 仪表技术与传感器, 2016(5): 29-31.

LI Yong, XU Gaobin, CHEN Xing, et al. Design of 4-bit distributed phase-shifter based on RF MEMS switch[J]. Instrumentation Technology and Sensors, 2016(5): 29-31.

REBEIZ G M. RF MEMS: Theory, Design, And Technology [M]. New York . John Wiley Sons, 2004: 52-116.

Relative Articles

Supplements(0)

Cited By

Proportional views