楔形偏转线圈和平板电极静电偏转器的偏转场的计算方法
THE NUMERICAL COMPUTATION OF DEFLECTION FIELD OF THE DEFLECTION YOKE WITH WEDGE PROFILE AND THE ELECTROSTATIC DEFLECTOR WITH PLANAR ELECTRODES
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摘要: 本文介绍楔形截面的偏转线圈和平板电极的静电偏转器的偏转场的计算方法。楔形线圈可以组合成形状多样的组合磁偏转器,有利于通过适当改变场分布形状,进一步减小偏转象差。矩形平板电极静电偏转器的优点是结构简单,有希望用它组成多电子束系统的偏转器阵列。根据上述两种偏转器的计算方法,已建立起实用的计算机程序,计算了一些典型结构偏转器的场分布。
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Abstract: This paper describes the computation methods of the deflection field of the deflection yoke with wedge profile and the electrostatic deflector with planar electrodes. The wedge yokes can be combined into various magnetic deflectors, which would offer a variety of choices for more effectively reducing the deflection aberrations by properly adjusting the deflection. field distribution. An advantage of the planar electrostatic deflector is its simplicity in structure. Thus it is probable that a deflector array for the multiple electron beam systems can be composed by the use of this kind of deflector. Based on the described methods in this paper, two practical computation programs have been worked out and, as examples, the field distributions of some typical deflectors have been computed. -
H. C. Chu and E. Munro, Proceeding of Microcircuit Engineering 80, edited by R. P. Kramer, Delft University, Amsterdam 1981, p. 19. [2] E. Munro and H. C. Chu, OPTIK, 60(1982), 371.[2]H. Ohiwa, E. Goto and A. Ono, Elect. Comm. Jpn, .54-B(1971), 44.[3]E. Goto and T. Soma, OPTIK, 48(1977), 255. -
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