放电激励XeF(BX)准分子激光器的高效率运转
HIGH-EFFICIENCY OPERATION OF A DISCHARGE-EXCITED XeF(BX) EXCIMER LASER
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摘要: 在一台X射线预电离的XeF(BX)准分子激光器中,我们应用磁开关隔离的预脉冲-主脉冲放电激励电路和磁脉冲压缩技术,研究了激光输出能量和转换效率对气体组份、总气压、电路参数和延迟时间的依赖关系,激光性能获得较大改进。当放电体积为0.11L,气体混合物(NF3/Xe/Ne)的总气压为2.5105 Pa时,激光输出能量345 mJ,总效率达3％。Abstract: In an X-ray preionized XeF(BX) discharge-excited laser driven by a prepulse-main pulse circuit with magnetic isolation and a pulse compressor the dependances of the laser output and conversion efficiency on gas composition, total gas pressure, circuit parameters and delay time were experimentally investigated. A considerable improvement in the laser performance was achieved. An output energy of 345 mJ with an overall efficiency of 3% was obtained from an active volume of 0.11L at a total gas pressure of 2.5105 Pa in a NF3/Xe/Ne mixture.
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Litzenberger L, Mandl A. Increased XeF(BX) laser efficiency at high pump rate and elevated temperature[J].Appl. Phys. Lett.1988, 52(19):1557-1559[2]Fisher C H, et al. High efficiency XeCl laser with spiker and magnetic isolation[J].Appl. Phys. Lett.1986, 48(23):1574-1576[3]Smilanski I, Buron S R, Burkes T R. Electrical excitation of an XeCl laser using magnetic pulse compression[J].Appl. Phys. Lett.1982, 40(7):547-548[4]Gerritsen J W, et al. High efficiency operation of a gas discharge XeCl laser using a magnetically induced resonant voltage overshoot circuit[J].J. Appl. Phys.1990, 67(7):3517-3519 -
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