多极静电偏转器获得均匀偏转场的方法
MULTIPOLE ELECTROSTATIC DEFLECTORS FOR OBTAINING UNIFORM DEFLECTION FIELD
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摘要: 本文推导了两种类型的多极静电偏转器在无穷长情况下场分布的普遍解;提供了多极静电偏转器在光轴附近获得均匀偏转场的方法;计算了六种实用的多极静偏器,给出了有关公式和数据,分析了两种多极静偏器之间的联系和区别。
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Abstract: The general field solutions are obtained for two kinds of infinitely long multipole electrostatic deflectors. A method is Riven to obtain uniform deflection field near optical axis. Having calculated six forms of the deflectors, the concerned formulas and data are given. The relationship and difference between ihe two kinds of deflectors are analysed. -
E. Goto, et al., J. Vac. Sci. Technol., B1(1983), 1289.[2]T. Hosokawa, et al., ibid., B1(1983), 1293.[3]M. Idesawa, et al., ibid., B1(1983), 1322.[4]J. C. Eidson, et al., ibid., 19(1981), 932.[5]S. Moriya, et al., ibid., B1(1983), 990.[6]G. Owen, et al., ibid., 19(1981), 1064.[7]R. G. E. Hutter, In advances in Image Pickup and Display, Vol. 1, p. 202, Edited by B. Kazan, 1974. -
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