Liu Haoning, Zhu Xieqing. NUMERICAL COMPUTATION OF PROCESSING ERROR EFFECT OF LENSES IN ELECTRON BEAM FOCUSING AND DEFLECTION SYSTEMS[J]. Journal of Electronics & Information Technology, 1990, 12(6): 614-627.
Citation:
Liu Haoning, Zhu Xieqing. NUMERICAL COMPUTATION OF PROCESSING ERROR EFFECT OF LENSES IN ELECTRON BEAM FOCUSING AND DEFLECTION SYSTEMS[J]. Journal of Electronics & Information Technology, 1990, 12(6): 614-627.
Liu Haoning, Zhu Xieqing. NUMERICAL COMPUTATION OF PROCESSING ERROR EFFECT OF LENSES IN ELECTRON BEAM FOCUSING AND DEFLECTION SYSTEMS[J]. Journal of Electronics & Information Technology, 1990, 12(6): 614-627.
Citation:
Liu Haoning, Zhu Xieqing. NUMERICAL COMPUTATION OF PROCESSING ERROR EFFECT OF LENSES IN ELECTRON BEAM FOCUSING AND DEFLECTION SYSTEMS[J]. Journal of Electronics & Information Technology, 1990, 12(6): 614-627.
The numerical computation of processing error effect of lenses (i.e., the ellipticity and tilt of electrodes/pole-pieces in electron beam focusing and deflection systems) and its evaluation are discussed. First, the computation of the potential distributions of lenses with elliptical holes of tilt surfaces on electrodes/pole-pieces using the finite element method is described. Then, the formulae for evaluating the changes of the optical properties caused by the processing errors (i.e., the additional image shifting and additional aberrations) are derived. Finally, some illustrative examples of processing error effect evaluated by the computer programs developed are shown as the spot-diagrams.
朱协卿,刘浩宁,电子科学学刊,12(1989)4,402-414.[2]西门纪业,电子和离子光学原理及像差导论,科学出版社,北京,p. 56.[3]E. Munro, Ph. D thesis, University of Cambridge, 1972, p. 123.[4]E. Munro, H. C. Chu, Optik,60(1982) 4, 371.[5]E. Munro. H. C. Chu, Optik,61 (1982)1,1.[6]H. C. Chu. E. Munro, Optik, 61(1982)2, 121.
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