Lin Shichang, Zhang Yansheng, Chai Zhang, Li Biqin. EXPERIMENTAL STUDIES OF ELECTRON BEAM SCULPTURE FOR SUPERCONDUCTING FILMS[J]. Journal of Electronics & Information Technology, 1995, 17(5): 553-556.
Citation:
Lin Shichang, Zhang Yansheng, Chai Zhang, Li Biqin. EXPERIMENTAL STUDIES OF ELECTRON BEAM SCULPTURE FOR SUPERCONDUCTING FILMS[J]. Journal of Electronics & Information Technology, 1995, 17(5): 553-556.
Lin Shichang, Zhang Yansheng, Chai Zhang, Li Biqin. EXPERIMENTAL STUDIES OF ELECTRON BEAM SCULPTURE FOR SUPERCONDUCTING FILMS[J]. Journal of Electronics & Information Technology, 1995, 17(5): 553-556.
Citation:
Lin Shichang, Zhang Yansheng, Chai Zhang, Li Biqin. EXPERIMENTAL STUDIES OF ELECTRON BEAM SCULPTURE FOR SUPERCONDUCTING FILMS[J]. Journal of Electronics & Information Technology, 1995, 17(5): 553-556.
A dry sculpture experiment for YBa2Cu3O7- superconducting film using scanning electron beam is presented. The effects of beam technological parameters on sculpture result are tested. The modification mechanism for superconducting films is discussed prelimiarily.
Stohr J A, et al. Proc. First Int. Congress Vacuum Techniques, Namur, Belgium: 1958, Vol. II Pergamon, Ozford, 1960: 536-544.[2]胡俊宝,等.低温与超导,1991,19(1); 49-53.[3]Shnichi Shibata, et al. Jpn J. Appl. Phys. 1988, 27(4):L646-648.[4]柴璋.氧化物超导体的结构特性和氧的非整比含量.中国化学会第四届无机化学讨论会论文摘要集.北戴河:1992,102.
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