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Volume 22 Issue 4
Jul.  2000
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Jiang Xiaohong, Zhao Tianxu, Hao Yue, Xu Guohua . FRACTAL INTERPOLATION MODEL OF IC DEFECT OUTLINES[J]. Journal of Electronics & Information Technology, 2000, 22(4): 659-666.
Citation: Jiang Xiaohong, Zhao Tianxu, Hao Yue, Xu Guohua . FRACTAL INTERPOLATION MODEL OF IC DEFECT OUTLINES[J]. Journal of Electronics & Information Technology, 2000, 22(4): 659-666.

FRACTAL INTERPOLATION MODEL OF IC DEFECT OUTLINES

  • Received Date: 1997-11-18
  • Rev Recd Date: 1999-03-09
  • Publish Date: 2000-07-19
  • Available defect outline model used for yield prediction and inductive fault analysis of integrated circuits (IC) all model a real defect by replacing its real rugged outlines with circular discs or squares,then great errors were aroused in these models.Based on the idea of fractal interpolation,this paper presents a new model to characterize those real defect outlines.The comparison of the new model with those models available indicates that the new model is a more accurate defect outline model.
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  • Ferguson F J,Shen J P.Extraction and simulation of realistic CMOS faults using inductive fault analysis,presented at the Internat.Test Conf.,Paris:1988,136-140.[2]Prabhu A V F.Modeling the critical area in yield forecasts,IEEE J[J].of Solid-State Circ.1985,20(4):874-878[3]Lukaszek W,Yarbrough W,Walker T,Meindl J.CMOS test chip design for process problem debugging and yield prediction experiments,Solid State Technol.,1986,29(3):87-93.[4]Spiegel G,Stroele A P.Optimization of deterministic test sets using an estimation of product quality,Presented at the Asian Test Symp.,Bejing,China:Nov.1993,67-72.[5]Hess C,Strole A.Modeling of real defect outlines for defect size distribution and yield prediction,Proc.IEEE Int.Conference on Microelectronics Test Structures,March 1993,45-50.[6]姜晓鸿,郝跃等.IC制造中的真实缺陷轮廓表征方法研究,电子学报,1998,26(2):11-14.[7]林鸿溢等.分形论-奇异性探索.北京:北京理工大学出版社,1992,98-125.[8]姜晓鸿,郝跃,徐国华.IC制造中的真实缺陷轮廓的分形特征.半导体学报,19(2):123-126.[9]姜晓鸿,郝跃,徐国华.IC缺陷轮廓的盒维数及其方向的分布特征.半导体学报,19(8):625-630.[10][英]肯尼思.法尔可内著,曾文曲等译.分形几何数学基础及其应用.沈阳:东北大学出版社,1993,110-130.[11]姜晓鸿,郝跃,徐国华. Goodness-of-FIT tests for distributions of the ratio dmax/dmin of the real defect outlines in the IC manufacturing process.J.of Xidian University,1997, 24(增刊):35-50.[12]中山大学数学力学系编.概率论及数理统计(下册).北京:高等教育出版社,1985,138-150.
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