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Volume 8 Issue 2
Mar.  1986
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Tan Kaisheng, Li Jianping. UV SURFACE CLEANING METHOD FOR REMOVING HYDROCARBONS FROM GaAs SURFACE[J]. Journal of Electronics & Information Technology, 1986, 8(2): 155-157.
Citation: Tan Kaisheng, Li Jianping. UV SURFACE CLEANING METHOD FOR REMOVING HYDROCARBONS FROM GaAs SURFACE[J]. Journal of Electronics & Information Technology, 1986, 8(2): 155-157.

UV SURFACE CLEANING METHOD FOR REMOVING HYDROCARBONS FROM GaAs SURFACE

  • Received Date: 1985-02-07
  • Rev Recd Date: 1985-08-29
  • Publish Date: 1986-03-19
  • A simple but high-efficient UV surf ace cleaning method for removing absorbed hydrocarbons from GaAs surface is described. The analytic results of Auger spectra show that the method is very effective.
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  • I. Shiota, et al., J. Eletrochem. Soc.: Solid-State Science and Technology,124(1977), 155.[2]Y. Z. Lui, J. L. Moli and W.E. Spicer, Appl. Phys. Lett., 14 (1969), 275.[3]S. Garbe and G. Frank, Solid-State Commun., 7(1969), 615.[4]H. W. Prengle, et al., Hydrocarbon Processing, pp. 82-86, Oct. 1975.[5]J. G. Clavert and J. N. Pitts, Jr.,Photochemistry, pp. 205-209, 681-705.John Wiley and Sons, New York. 1965.[6]J.R.McNesby and H. Okabe, Advances in Photoobhemistry, Vol. 3, 1964, pp. 166-174.[7]J.R.Vig, UV/Ozon Cleaning of Surfaces: A Review, Private communication.
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