THE EFFECT OF NITROGEN ADDITION ON FIELD EMISSION OF DIAMOND-LIKE CARBON FILMS

Ma Huizhong; Zhang Lan; Yao Ning; Bi Zhaoqi; Wang Xiaoping; Li Yunjun; Zhang Binglin; Hu Huanling

Volume 23 Issue 11

Nov. 2001

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Ma Huizhong, Zhang Lan, Yao Ning, Bi Zhaoqi, Wang Xiaoping, Li Yunjun, Zhang Binglin, Hu Huanling. THE EFFECT OF NITROGEN ADDITION ON FIELD EMISSION OF DIAMOND-LIKE CARBON FILMS[J]. Journal of Electronics & Information Technology, 2001, 23(11): 1246-1248.

Citation:

Ma Huizhong, Zhang Lan, Yao Ning, Bi Zhaoqi, Wang Xiaoping, Li Yunjun, Zhang Binglin, Hu Huanling. THE EFFECT OF NITROGEN ADDITION ON FIELD EMISSION OF DIAMOND-LIKE CARBON FILMS[J]. Journal of Electronics & Information Technology, 2001, 23(11): 1246-1248.

Citation:

Ma Huizhong, Zhang Lan, Yao Ning, Bi Zhaoqi, Wang Xiaoping, Li Yunjun, Zhang Binglin, Hu Huanling. THE EFFECT OF NITROGEN ADDITION ON FIELD EMISSION OF DIAMOND-LIKE CARBON FILMS[J]. Journal of Electronics & Information Technology, 2001, 23(11): 1246-1248.

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THE EFFECT OF NITROGEN ADDITION ON FIELD EMISSION OF DIAMOND-LIKE CARBON FILMS

Received Date: 1999-07-26
Rev Recd Date: 1999-08-13
Publish Date: 2001-11-19

Abstract

Abstract

The Diamond-Like Carbon (DLC) film and Nitrogen-doped DLC(N-DLC) film are deposited on molybdenum coated ceramic substrate by using the pulsed laser deposition technique. The microstructure and morphology of the films are examined using X-ray diffraction, Raman spectroscopy and scanning electron microscopy. Field emission measurements are carried out by using the diode structure. The field emission measurements indicate that nitrogen doping can lower the turn-on field and increase the current density.

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References(1)

References

Z. Feng, I. G. Brown, J. W. Auger, Electron emission from chemical vapor deposited diamondand amorphous carbon films observed with a simple field emission device, J. Mater. Res, 1995,10(7), 1585-1588.[2]F.Y. Chuang, C. Y. Sun, et al., Local electron field emission characteristics of pulsed laserdeposited diamondlike carbon films, Appl. Phys. Left., 1996, 69(23), 3504-3506.[3]Young Kyu Hong.[J].Ju-Jin Kim, et al., Field electron emission of diamond-like-carbon films de-posited by a laser ablation method, Techanical Digest of IVCM97, Korea.1997,:-[4]G.A.J. Amaratunga, S. R. P. Silva, Nitrogen containing hydrogenated amorphous carbon forthin-film field emission cathodes, Appl. Phys. Lett., 68(18), 1996, 2529-2531.[5]J. Chen, A. X. Wei, et al., Study of field electron emission phenomena associated with n-dopedamorphous diamond films, Journal of Vacuum Science and Technology, B16(2), 1998, 697-699.

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