Zhu Dajun, Liu Sbenggang. THE SIMULATION FOR MICROWAVE PLASMA BREAKDOWN PROCESS[J]. Journal of Electronics & Information Technology, 1997, 19(2): 258-262.
Citation:
Zhu Dajun, Liu Sbenggang. THE SIMULATION FOR MICROWAVE PLASMA BREAKDOWN PROCESS[J]. Journal of Electronics & Information Technology, 1997, 19(2): 258-262.
Zhu Dajun, Liu Sbenggang. THE SIMULATION FOR MICROWAVE PLASMA BREAKDOWN PROCESS[J]. Journal of Electronics & Information Technology, 1997, 19(2): 258-262.
Citation:
Zhu Dajun, Liu Sbenggang. THE SIMULATION FOR MICROWAVE PLASMA BREAKDOWN PROCESS[J]. Journal of Electronics & Information Technology, 1997, 19(2): 258-262.
Using the fluid model and making the plasma as isotropic medium, the microwave field in a cylindrical cavity is obtained. Coupled with fluid equations for the electron and ion motion, the microwave discharge courses are calculated. The results show that the density distribution of ion and electron is similar to electric field distribution. Also, a critical electron density is exist. Above this density, microwave field will damp rapidly, so the gas ionization is mainly on the surface.
Moisan M, Zakrzewski Z. Plasma sources based on the propagation of electromagnetic surface waves J Phys. D, 1991, 24(7): 1025-1048.[2][2][3]Rakem Z, Leprince P, Marec J. Modelling of a nucrowave discharge created by a standing surface wave[J].J Phys. D.1992, 25(6):953-959[4]Hunermann L, Meyer R, et al. Excitation of an excimer laser with microwave resonator[J].SPIE.1991,1503:134-138[5]Hirch M N, Oskam H J. Gaseous Electronics. Vol. 1. New York: Academic Press, lnc. 1978, Chapter 3: 173-217.
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