OPERATING CHARACTERISTICS FOR A FIELD EMISSION GUN WITH W[111] TIP

Yang Deqing; Chen Ergang

Volume 14 Issue 3

May 1992

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Article Navigation > Journal of Electronics & Information Technology > 1992 > 14(3): 295-300

Yang Deqing, Chen Ergang. OPERATING CHARACTERISTICS FOR A FIELD EMISSION GUN WITH W[111] TIP[J]. Journal of Electronics & Information Technology, 1992, 14(3): 295-300.

Citation:

Yang Deqing, Chen Ergang. OPERATING CHARACTERISTICS FOR A FIELD EMISSION GUN WITH W[111] TIP[J]. Journal of Electronics & Information Technology, 1992, 14(3): 295-300.

Yang Deqing, Chen Ergang. OPERATING CHARACTERISTICS FOR A FIELD EMISSION GUN WITH W[111] TIP[J]. Journal of Electronics & Information Technology, 1992, 14(3): 295-300.

Citation:

Yang Deqing, Chen Ergang. OPERATING CHARACTERISTICS FOR A FIELD EMISSION GUN WITH W[111] TIP[J]. Journal of Electronics & Information Technology, 1992, 14(3): 295-300.

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OPERATING CHARACTERISTICS FOR A FIELD EMISSION GUN WITH W[111] TIP

Received Date: 1991-03-19
Rev Recd Date: 1991-07-22
Publish Date: 1992-05-19

Abstract

Abstract

The fabrication method of W[111] tip and the operating characteristics ofa field emission gun (PEG) which consists of W[111] tip, first and second anodes are reported. Experimental results show that on condition that the vacuum in the gun chamber is better than 510-7 Pa and acceleration voltage is 30kV, the finite radius of the virtual source of the FEG is 1.6nm, and the brightness of FEG is estimated as 3.8109 A/cm2, sterad; on condition that the field emission current is 1A, the stability of beam current is better than 5% in 10 min. It is able to be used in scanning electron microscopesand electron probe system etc.

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References(1)

References

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