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Volume 17 Issue 2
Mar.  1995
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Ju Xin, Yang Jianhong. STUDY ON THE PARTICLE SIZE EFFECT OF Ta DOPED Ru-BASE THICK FILM RESISTOR[J]. Journal of Electronics & Information Technology, 1995, 17(2): 215-219.
Citation: Ju Xin, Yang Jianhong. STUDY ON THE PARTICLE SIZE EFFECT OF Ta DOPED Ru-BASE THICK FILM RESISTOR[J]. Journal of Electronics & Information Technology, 1995, 17(2): 215-219.

STUDY ON THE PARTICLE SIZE EFFECT OF Ta DOPED Ru-BASE THICK FILM RESISTOR

  • Received Date: 1993-10-15
  • Rev Recd Date: 1994-08-24
  • Publish Date: 1995-03-19
  • This paper reports the particle size effect on the resistance and TCR of Ta-doped Ru-base thick film resistor, which occurs when the particle sizes of two phases reach critical values (conductive phase 25nm, glass phase 50nm). And it can be explained qualitatively with the conduction mechanism of thick film resistor.
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  • Inokuma T. Denki Kagaku, 1992, 50: 785-788.[2][2][3]Inokuma T. Denki Kagaku, 1983, 51: 721-726.[4]Boonstra A H, Mutsaers C A H A.[J]. Thin Solid Film.1980,67:13-[5]Inokuma T, et al, IEEE Trans. on CHMT, 1985, CHMT-8(3): 372-373.[6]Carciq P F, et al. J. Appl. Phys.,1982, 53(7): 5282 -5287.[7][6][8]巨新,等.电子学报,1993,21(5): 96-99.[9]埃克托瓦 L. 薄膜物理学,北京:科学出版社,1986,164- 178.
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