Wu Xiang-Sheng, Yang Yi, Chen Pei-Ran, Xu Shao-Hua, Li Yun-Ping, Hu Dao-Shan. MISPLACED p-n JUNCTION IN D. H. GaInAsP/InP WAFER GROWN BY LPE[J]. Journal of Electronics & Information Technology, 1982, 4(4): 242-247.
Citation:
Wu Xiang-Sheng, Yang Yi, Chen Pei-Ran, Xu Shao-Hua, Li Yun-Ping, Hu Dao-Shan. MISPLACED p-n JUNCTION IN D. H. GaInAsP/InP WAFER GROWN BY LPE[J]. Journal of Electronics & Information Technology, 1982, 4(4): 242-247.
Wu Xiang-Sheng, Yang Yi, Chen Pei-Ran, Xu Shao-Hua, Li Yun-Ping, Hu Dao-Shan. MISPLACED p-n JUNCTION IN D. H. GaInAsP/InP WAFER GROWN BY LPE[J]. Journal of Electronics & Information Technology, 1982, 4(4): 242-247.
Citation:
Wu Xiang-Sheng, Yang Yi, Chen Pei-Ran, Xu Shao-Hua, Li Yun-Ping, Hu Dao-Shan. MISPLACED p-n JUNCTION IN D. H. GaInAsP/InP WAFER GROWN BY LPE[J]. Journal of Electronics & Information Technology, 1982, 4(4): 242-247.
Misplaced p-n junetion in the LPE D. H. GaInAsP/InP wafer is investigated by scanning electron microscope and electron beam-induced current method. It is shown that one of the reasons for the misplaced p-n junetion is Zn contamination. By controlling doping level of p-type dopant Zn, or using Mg as p-type dopant, the correctly located p-n junetion is obtained. The locations of the p-n junetion of some samples are measured by electrochemical c-v method. The results obtained are consistent with the emission spectrum of the LED fabricated from the wafers.
Y.Takamashi, et al., Jap. J. Appl. Phys., 18(1979).1615.[3]K.Iga, et al., IEEE J. on QE. QE-15 (1979), 707.[5]J. J. Coloman, et al., Electron Lett., 14(1978), 558.[6]邬祥生等,液相外延生长1. 3 um, GaInAsP/InP双异质结,半导体学报,(待发表)。[7]H. Grothe, et al.,Electron Lett., 15(1979), 702.[10]陈自姚等,半导体光电,1981年,第2期,第207页.[11]H.D. Law., IEEE. J. on QE, QE-18(1979), 549.